Center for Nanotechnology Education and Utilization (CNEU)

  • United States

Organization profile

Organization profile

Research Interests

Fingerprint The fingerprint is based on mining the text of the scientific documents related to the associated persons. Based on that an index of weighted terms is created, which defines the key subjects of research unit

Plasma density Engineering & Materials Science
nanotechnology Physics & Astronomy
Silicon nitride Engineering & Materials Science
Nanotechnology Engineering & Materials Science
education Physics & Astronomy
Education Engineering & Materials Science
Silanes Chemical Compounds
Electron cyclotron resonance Engineering & Materials Science


No photo of Robert Kenneth Ehrmann

Robert Kenneth Ehrmann

Person: Academic

No photo of Terence Kuzma

Research Output 1999 2006

  • 17 Citations
  • 2 h-Index
  • 2 Conference contribution
  • 1 Article
6 Citations

Education and training approach for the future nanotechnology workforce

Fonash, S. J., Fenwick, D., Hallacher, P., Kuzma, T. & Nam, W. J., 2006, NanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectronics - Proceedings. Vol. 2006. p. 235-236 2 p. 1609719

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Technical presentations

Nanotechnology education: The Pennsylvania approach

Fonash, S., Fenwick, D., Hallacher, P., Kuzma, T., Brunner, A., Mahoney, W. & Ehrmann, R., Dec 1 2006, Education in Nanoscience and Engineering. Vol. 931. p. 106-115 10 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations

Pathway to depositing device-quality 50°C silicon nitride in a high-density plasma system

Farber, D. G., Bae, S., Okandan, M., Reber, D. M., Kuzma, T. & Fonash, S. J., Jun 1 1999, In : Journal of the Electrochemical Society. 146, 6, p. 2254-2257 4 p.

Research output: Contribution to journalArticle

Plasma density
Silicon nitride
Electron cyclotron resonance
Electric breakdown