Research Output 1986 2019

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Paper
2015
5 Citations (Scopus)

Efficient and sensitive energy harvesting using piezoelectric mems compliant mechanisms

Ma, X., Yeo, H. G., Rahn, C. D. & Trolier-McKinstry, S., Jan 1 2015.

Research output: Contribution to conferencePaper

Compliant mechanisms
Compliant Mechanism
Energy Harvesting
Energy harvesting
Harvesters
2013
2 Citations (Scopus)

Comparable measurements and modeling of piezoelectric thin films for MEMS application

Schmitz-Kempen, T., Tiedke, S., Mardilovich, P., Sivaramakrishnan, S., Lisec, T., Stoppel, F., Trolier-McKinstry, S. E. & Muralt, P., Jan 1 2013, p. 211-213. 3 p.

Research output: Contribution to conferencePaper

MEMS
Thin films
Control nonlinearities
Substrates
Electrodes

PZT-based high coupling with low permittivity thin films

Wasa, K., Matsushima, T., Adachi, H., Matsunaga, T., Suzuki, M., Yanagitani, T., Yamamoto, T., Yoshida, S., Tanaka, S. & Trolier-Mckinstry, S., Jan 1 2013, p. 69-72. 4 p.

Research output: Contribution to conferencePaper

Permittivity
Thin films
Energy harvesting
MEMS
Single crystals
2005

Piezoelectric films for mems applications

Trolier-McKinstry, S. E., Gharb, N. B., Hong, E., Lacey, J., Nino, J., Xu, F., Wolf, R. A., Yoshimura, T., Zhang, Q. & Zhou, Q., Dec 13 2005, p. 190-195. 6 p.

Research output: Contribution to conferencePaper

Lead
Thin films
Ferroelectric thin films
Ytterbium
Domain walls
3 Citations (Scopus)

Processing and properties of high aspect ratio ferroelectric structures

Bharadwaja, S. S. N., Won, D. J., Fang, H., Gopalan, V., Trolier-McKinstry, S. E., Saldanha, N. & Mayer, T., Dec 6 2005, p. 189-192. 4 p.

Research output: Contribution to conferencePaper

Ferroelectric materials
Aspect ratio
Photonic band gap
Photonic devices
Reactive ion etching
2002
26 Citations (Scopus)

Piezoelectric films for MEMS applications

Xu, F., Wolf, R. A., Yoshimura, T. & Trolier-McKinstry, S. E., Dec 1 2002, p. 386-396. 11 p.

Research output: Contribution to conferencePaper

actuation
microelectromechanical systems
MEMS
Ferroelectric thin films
piezoelectricity
2000

Processing and electrical properties of Pb(Yb1/2Nb1/2)-PbTiO3 ceramics at the morphotropic phase boundary

Duran, C., Trolier-McKinstry, S. & Messing, G. L., Dec 1 2000, p. 409-412. 4 p.

Research output: Contribution to conferencePaper

Remanence
Phase boundaries
Electric properties
Permittivity
Sintering
1998
6 Citations (Scopus)

High-resolution dry etch patterning of PZT for piezoelectric MEMS devices

Zeto, R. J., Rod, B. J., Dubey, M., Ervin, M. H., Piekarz, R. C., Trolier-McKinstry, S. E., Su, T. & Shepard, J. F., Dec 1 1998, p. 89-92. 4 p.

Research output: Contribution to conferencePaper

Argon
Platinum
MEMS
Masks
Ions
1996
5 Citations (Scopus)

Electrical properties and phase transformations in antiferroelectric lead zirconate thin films

Yamakawa, K., Trolier-McKinstry, S. E. & Dougherty, J. P., Dec 1 1996, p. 405-408. 4 p.

Research output: Contribution to conferencePaper

Ferroelectric materials
Electric properties
Lead
Phase transitions
Polarization
27 Citations (Scopus)

Fabrication of textured Bi4Ti3O12 by templated grain growth

Horn, J. A., Zhang, S. C., Selvaraj, U., Messing, G. L., Trolier-McKinstry, S. E. & Yokoyama, M., Dec 1 1996, p. 943-946. 4 p.

Research output: Contribution to conferencePaper

Grain growth
Powders
Fabrication
Laminating
Coprecipitation
1 Citation (Scopus)

Microstructure development in lead zirconate titanate ferroelectric thin films during annealing

Aungkavattana, P. & Trolier-McKinstry, S. E., Dec 1 1996, p. 801-804. 4 p.

Research output: Contribution to conferencePaper

Ferroelectric thin films
Spectroscopic ellipsometry
Annealing
Microstructure
Refractive index
11 Citations (Scopus)

Processing of PZT piezoelectric thin films for microelectromechanical systems

Hendrickson, M., Su, T., Trolier-McKinstry, S., Rod, B. J. & Zeto, R. J., Dec 1 1996, p. 683-686. 4 p.

Research output: Contribution to conferencePaper

MEMS
1,1,1,2-tetrafluoro-2-chloroethane
Thin films
Processing
Lead
24 Citations (Scopus)

Properties of PZT thin films as a function of in-plane biaxial stress

Shepard, J. F., Trolier-McKinstry, S. E., Hendrickson, M. A. & Zeto, R., Dec 1 1996, p. 161-165. 5 p.

Research output: Contribution to conferencePaper

Thin films
Capacitors
Electrodes
Sol-gels
lead titanate zirconate
6 Citations (Scopus)

Properties of sol-gel-derived lead zirconate titanate (PZT) thin films on platinum-coated silicon substrates

Xu, F. & Trolier-McKinstry, S., Dec 1 1996, p. 511-514. 4 p.

Research output: Contribution to conferencePaper

Silicon
Platinum
Sol-gels
Thin films
Substrates
5 Citations (Scopus)

Size effects in barium titanate thin film heterostructures with conductive oxide electrodes

Maria, J-P., Trolier-McKinstry, S. E. & Schlom, D. G., Dec 1 1996, p. 333-336. 4 p.

Research output: Contribution to conferencePaper

Barium titanate
Oxides
Ferroelectric materials
Heterojunctions
Thin films
40 Citations (Scopus)

Templated grain growth of textured Sr2Nb2O7

Brahmaroutu, B., Messing, G. L., Trolier-McKinstry, S. E. & Selvaraj, U., Dec 1 1996, p. 883-886. 4 p.

Research output: Contribution to conferencePaper

Grain growth
Powders
Tapes
Single crystals
Solid state reactions
1994
7 Citations (Scopus)

Characterization of PZT hollow-sphere transducers

Fielding, J. T., Smith, D., Meyer, Jr., R. J., Trolier-McKinstry, S. E. & Newnham, R. E., Dec 1 1994, p. 202-205. 4 p.

Research output: Contribution to conferencePaper

Transducers
Hydrophones
Blow molding
Gases
Imaging techniques
1 Citation (Scopus)

Thinned ferroelectric crystals and ceramics

Trolier-McKinstry, S. E., Dec 1 1994, p. 233-236. 4 p.

Research output: Contribution to conferencePaper

Ferroelectric materials
Polishing
Crystals
Spectroscopic ellipsometry
Etching
1986
12 Citations (Scopus)

ETCHED PIEZOELECTRIC STRUCTURES.

Trolier-McKinstry, S. E., Gelst, C., Safari, A., Newnham, R. E. & Xu, Q. C., Dec 1 1986, p. 707-710. 4 p.

Research output: Contribution to conferencePaper

Etching
Photoresists
Piezoelectric devices
Geometry
Microfabrication

MULTILAYER ACTUATOR DESIGN.

Carlson, W. B., Trolier, S. E., Safari, A., Newnham, R. E. & Cross, L. E., Dec 1 1986, p. 641-644. 4 p.

Research output: Contribution to conferencePaper

Multilayers
Actuators
Piezoelectric materials
Finite difference method
Resonators