Jeffery B. Fortin, PhD

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    Fluorine Chemical Compounds
    Thin films Chemical Compounds
    fluorine Physics & Astronomy
    Ion beams Chemical Compounds
    thin films Physics & Astronomy
    ion beams Physics & Astronomy
    Xerogels Chemical Compounds
    xerogels Physics & Astronomy

    Research Output 1998 2003

    96 Citations (Scopus)

    A model for the chemical vapor deposition of poly(para-xylylene) (parylene) thin films

    Fortin, J. B. & Lu, T. M., Jun 8 2002, In : Chemistry of Materials. 14, 5, p. 1945-1949 5 p.

    Research output: Contribution to journalArticle

    Chemical vapor deposition
    Thin films
    3 Citations (Scopus)

    Stability of fluorinated parylenes to oxygen reactive-ion etching under aluminum, aluminum oxide, and tantalum nitride overlayers

    Senkevich, J. J., Wang, B., Fortin, J. B., Nielsen, M. C., McDonald, J. F., Lu, T. M., Nuesca, G. M., Peterson, G. G., Selbrede, S. C. & Weise, M. T., Jan 1 2003, In : Journal of Electronic Materials. 32, 9, p. 925-931 7 p.

    Research output: Contribution to journalArticle

    tantalum nitrides
    Aluminum Oxide
    Reactive ion etching

    Modification of low κ materials for ULSI multilevel interconnects by ion implantation

    Roy, A. N. U., Mallikarjunan, A., Kumar, A., Fortin, J., Shekhawat, G. S., Geer, R., Dovidenko, K., Lifshin, E., Bakhru, H. & Lu, T. M., Dec 1 2002, In : Materials Research Society Symposium - Proceedings. 716, p. 349-354 6 p.

    Research output: Contribution to journalConference article

    Ion implantation
    ion implantation
    17 Citations (Scopus)

    Dielectric constant measurement of thin films using goniometric terahertz time-domain spectroscopy

    Li, M., Fortin, J., Kim, J. Y., Fox, G., Chu, F., Davenport, T., Lu, T. M. & Zhang, X. C., Jul 1 2001, In : IEEE Journal on Selected Topics in Quantum Electronics. 7, 4, p. 624-629 6 p.

    Research output: Contribution to journalArticle

    Phase shift
    phase shift
    Brewster angle

    Dielectric property measurement of sub-micron thin film by differential time-domain spectroscopy

    Lee, K. S., Kim, J. Y., Fortin, J. B., Jiang, Z., Li, M., Lu, T. M. & Zhang, X. C., Dec 1 2001, In : Springer Series in Chemical Physics. 66, p. 232-234 3 p.

    Research output: Contribution to journalArticle

    Dielectric properties
    dielectric properties
    Thin films
    thin films