Jeffery B. Fortin, PhD

    19982003
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    Fingerprint Dive into the research topics where Jeffery B. Fortin is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

    Fluorine Chemical Compounds
    Thin films Chemical Compounds
    fluorine Physics & Astronomy
    Ion beams Chemical Compounds
    thin films Physics & Astronomy
    ion beams Physics & Astronomy
    Xerogels Chemical Compounds
    xerogels Physics & Astronomy

    Research Output 1998 2003

    95 Citations (Scopus)

    A model for the chemical vapor deposition of poly(para-xylylene) (parylene) thin films

    Fortin, J. B. & Lu, T. M., Jun 8 2002, In : Chemistry of Materials. 14, 5, p. 1945-1949 5 p.

    Research output: Contribution to journalArticle

    Chemisorption
    Chemical vapor deposition
    Monomers
    Thin films
    Physisorption
    2 Citations (Scopus)

    Stability of fluorinated parylenes to oxygen reactive-ion etching under aluminum, aluminum oxide, and tantalum nitride overlayers

    Senkevich, J. J., Wang, B., Fortin, J. B., Nielsen, M. C., McDonald, J. F., Lu, T. M., Nuesca, G. M., Peterson, G. G., Selbrede, S. C. & Weise, M. T., Jan 1 2003, In : Journal of Electronic Materials. 32, 9, p. 925-931 7 p.

    Research output: Contribution to journalArticle

    tantalum nitrides
    Tantalum
    Aluminum Oxide
    Reactive ion etching
    Aluminum

    Modification of low κ materials for ULSI multilevel interconnects by ion implantation

    Roy, A. N. U., Mallikarjunan, A., Kumar, A., Fortin, J. B., Shekhawat, G. S., Geer, R., Dovidenko, K., Lifshin, E., Bakhru, H. & Lu, T. M., Dec 1 2002, In : Materials Research Society Symposium - Proceedings. 716, p. 349-354 6 p.

    Research output: Contribution to journalConference article

    Ion implantation
    ion implantation
    hardness
    Hardness
    Argon
    17 Citations (Scopus)

    Dielectric constant measurement of thin films using goniometric terahertz time-domain spectroscopy

    Li, M., Fortin, J. B., Kim, J. Y., Fox, G., Chu, F., Davenport, T., Lu, T. M. & Zhang, X. C., Jul 1 2001, In : IEEE Journal on Selected Topics in Quantum Electronics. 7, 4, p. 624-629 6 p.

    Research output: Contribution to journalArticle

    Phase shift
    Permittivity
    phase shift
    Brewster angle
    Spectroscopy

    Dielectric property measurement of sub-micron thin film by differential time-domain spectroscopy

    Lee, K. S., Kim, J. Y., Fortin, J. B., Jiang, Z., Li, M., Lu, T. M. & Zhang, X. C., Dec 1 2001, In : Springer Series in Chemical Physics. 66, p. 232-234 3 p.

    Research output: Contribution to journalArticle

    Dielectric properties
    dielectric properties
    Spectroscopy
    Thin films
    thin films