(001)-Oriented LaNiO3 bottom electrodes and (001)-textured ferroelectric thin HLMS on LaNiO3

Zhenshan Zhang, Jeong Hwan Park, Susan E. Trolier-McKinstry

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

In this work, highly (001)pc-oriented thin films of LaNiO3 (LNO) were deposited by DC magnetron sputtering onto Si substrates (pc = pseudocubic indices). The target powder was prepared using a molten salt technique with Na2CO3 as a flux. The final target density was greater than 85% of theoretical density. The best results were obtained when sputtering was carried out at a power of 186 W and a working pressure of 45 mtorr with a gas composition of 50% O2 + 50% Ar. The thickness of the deposited films was proportional to the sputtering time, and the growth rate was 300Å/hour. Highly (001)-oriented thin films of lead zirconate titanate Pb(Zr0.52Ti0.48)O3 (PZT) and Pb[(Mg1/3Nb2/3)0.7Ti0.3]O 3 (PMN-PT) were fabricated by a sol-gel method on (001)-textured LNO metallic oxide electrodes. A remanent polarization of 12 μC/cm2 and d31 of -125 pC/N (assuming a Young's modulus of 35 GPa) were measured on the PMN-PT thin films with a thickness of 0.9 μm. This piezoelectric coefficient considerably exceeds that available from PZT films, and depends critically on the film orientation. Changes in the hysteresis loop due to externally applied stress will also be described.

Original languageEnglish (US)
Pages (from-to)73-78
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume596
DOIs
StatePublished - Jan 1 2000

Fingerprint

Ferroelectric materials
Thin films
Electrodes
Sputtering
electrodes
thin films
sputtering
Remanence
molten salts
gas composition
Hysteresis loops
Powders
Magnetron sputtering
Oxides
Sol-gel process
Molten materials
modulus of elasticity
magnetron sputtering
Salts
Elastic moduli

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

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abstract = "In this work, highly (001)pc-oriented thin films of LaNiO3 (LNO) were deposited by DC magnetron sputtering onto Si substrates (pc = pseudocubic indices). The target powder was prepared using a molten salt technique with Na2CO3 as a flux. The final target density was greater than 85{\%} of theoretical density. The best results were obtained when sputtering was carried out at a power of 186 W and a working pressure of 45 mtorr with a gas composition of 50{\%} O2 + 50{\%} Ar. The thickness of the deposited films was proportional to the sputtering time, and the growth rate was 300{\AA}/hour. Highly (001)-oriented thin films of lead zirconate titanate Pb(Zr0.52Ti0.48)O3 (PZT) and Pb[(Mg1/3Nb2/3)0.7Ti0.3]O 3 (PMN-PT) were fabricated by a sol-gel method on (001)-textured LNO metallic oxide electrodes. A remanent polarization of 12 μC/cm2 and d31 of -125 pC/N (assuming a Young's modulus of 35 GPa) were measured on the PMN-PT thin films with a thickness of 0.9 μm. This piezoelectric coefficient considerably exceeds that available from PZT films, and depends critically on the film orientation. Changes in the hysteresis loop due to externally applied stress will also be described.",
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(001)-Oriented LaNiO3 bottom electrodes and (001)-textured ferroelectric thin HLMS on LaNiO3 . / Zhang, Zhenshan; Park, Jeong Hwan; Trolier-McKinstry, Susan E.

In: Materials Research Society Symposium - Proceedings, Vol. 596, 01.01.2000, p. 73-78.

Research output: Contribution to journalArticle

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