2-D MEMS scanner for handheld multispectral confocal microscopes

Il Woong Jung, Santi Rattanavarin, Pongsak Sarapukdee, Michael J. Mandella, Wibool Piyawattanametha, Daniel Lopez

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

We describe a 2-D MEMS scanner for a handheld multispectral confocal microscope for early detection of cervical cancer. The MEMS scanner has an inner gimbal design with torsional springs separated from the reflectors to reduce light loss while maintaining chip size to 3.25 × 3.25 mm2. The devices are large-scale batch fabricated using a double layer SOI process. The scanner has electrostatic optical deflection angles of 3.25°for the inner axis at 75V and ±1.6 for the outer axis at 60V. The device has resonance frequencies of 2.84kHz and 452Hz for the inner and outer axis torsional modes respectively.

Original languageEnglish (US)
Title of host publication2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Pages238-239
Number of pages2
DOIs
StatePublished - 2012
Event2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada
Duration: Aug 6 2012Aug 9 2012

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
CountryCanada
CityBanff, AB
Period8/6/128/9/12

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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