6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3

Fapeng Yu, Shujun Zhang, Xian Zhao, Duorong Yuan, Qing ming Wang, Thomas R. Shrout

Research output: Contribution to journalLetter

13 Citations (Scopus)

Abstract

Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range.

Original languageEnglish (US)
Pages (from-to)47-49
Number of pages3
JournalPhysica Status Solidi - Rapid Research Letters
Volume5
Issue number2
DOIs
StatePublished - Feb 1 2011

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piezoelectric crystals
Resonators
resonators
Acoustic waves
Crystals
acoustics
coefficients
Temperature
temperature
Electromechanical coupling
Q factors
shear
crystals

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Yu, Fapeng ; Zhang, Shujun ; Zhao, Xian ; Yuan, Duorong ; Wang, Qing ming ; Shrout, Thomas R. / 6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3. In: Physica Status Solidi - Rapid Research Letters. 2011 ; Vol. 5, No. 2. pp. 47-49.
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abstract = "Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2{\%} and 15.8 pC/N for PrCOB, 29.0{\%} and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range.",
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6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3. / Yu, Fapeng; Zhang, Shujun; Zhao, Xian; Yuan, Duorong; Wang, Qing ming; Shrout, Thomas R.

In: Physica Status Solidi - Rapid Research Letters, Vol. 5, No. 2, 01.02.2011, p. 47-49.

Research output: Contribution to journalLetter

TY - JOUR

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AU - Yu, Fapeng

AU - Zhang, Shujun

AU - Zhao, Xian

AU - Yuan, Duorong

AU - Wang, Qing ming

AU - Shrout, Thomas R.

PY - 2011/2/1

Y1 - 2011/2/1

N2 - Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range.

AB - Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range.

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