In Chapters 3 through 5 we described a number of R2R control algorithms. This chapter provides a comparative analysis of R2R control algorithms, focusing on their ability to provide robust and stable control in the face of linear and quadriatic drift.
|Original language||English (US)|
|Title of host publication||Run-to-Run Control in Semiconductor Manufacturing|
|Number of pages||14|
|ISBN (Print)||0849311780, 9780849311789|
|State||Published - Jan 1 2000|
All Science Journal Classification (ASJC) codes