A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

Zhe Ning, James R. Moyne, Taber H. Smith, Duane S. Boning, Enrique Del Castillo, Jinn Yi Yeh, Arnon M. Hurwitz

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

In Chapters 3 through 5 we described a number of R2R control algorithms. This chapter provides a comparative analysis of R2R control algorithms, focusing on their ability to provide robust and stable control in the face of linear and quadriatic drift.

Original languageEnglish (US)
Title of host publicationRun-to-Run Control in Semiconductor Manufacturing
PublisherCRC Press
Pages101-114
Number of pages14
ISBN (Electronic)9781420040661
ISBN (Print)0849311780, 9780849311789
StatePublished - Jan 1 2000

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Semiconductor materials
Industry

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Ning, Z., Moyne, J. R., Smith, T. H., Boning, D. S., Del Castillo, E., Yeh, J. Y., & Hurwitz, A. M. (2000). A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry. In Run-to-Run Control in Semiconductor Manufacturing (pp. 101-114). CRC Press.
Ning, Zhe ; Moyne, James R. ; Smith, Taber H. ; Boning, Duane S. ; Del Castillo, Enrique ; Yeh, Jinn Yi ; Hurwitz, Arnon M. / A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry. Run-to-Run Control in Semiconductor Manufacturing. CRC Press, 2000. pp. 101-114
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Ning, Z, Moyne, JR, Smith, TH, Boning, DS, Del Castillo, E, Yeh, JY & Hurwitz, AM 2000, A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry. in Run-to-Run Control in Semiconductor Manufacturing. CRC Press, pp. 101-114.

A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry. / Ning, Zhe; Moyne, James R.; Smith, Taber H.; Boning, Duane S.; Del Castillo, Enrique; Yeh, Jinn Yi; Hurwitz, Arnon M.

Run-to-Run Control in Semiconductor Manufacturing. CRC Press, 2000. p. 101-114.

Research output: Chapter in Book/Report/Conference proceedingChapter

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T1 - A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

AU - Ning, Zhe

AU - Moyne, James R.

AU - Smith, Taber H.

AU - Boning, Duane S.

AU - Del Castillo, Enrique

AU - Yeh, Jinn Yi

AU - Hurwitz, Arnon M.

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Y1 - 2000/1/1

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Ning Z, Moyne JR, Smith TH, Boning DS, Del Castillo E, Yeh JY et al. A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry. In Run-to-Run Control in Semiconductor Manufacturing. CRC Press. 2000. p. 101-114