A comparative study of SiN deposition methods for millimeter-wave AlGaN/GaN HFETs

Masataka Higashiwaki, Zhen Chen, Yi Pei, Rongming Chu, Stacia Keller, Nobumitsu Hirose, Takashi Mimura, Toshiaki Matsui, Umesh K. Mishra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations
Original languageEnglish (US)
Title of host publication66th DRC Device Research Conference Digest, DRC 2008
Pages207-208
Number of pages2
DOIs
StatePublished - Dec 1 2008
Event66th DRC Device Research Conference Digest, DRC 2008 - Santa Barbara, CA, United States
Duration: Jun 23 2008Jun 25 2008

Publication series

NameDevice Research Conference - Conference Digest, DRC
ISSN (Print)1548-3770

Other

Other66th DRC Device Research Conference Digest, DRC 2008
CountryUnited States
CitySanta Barbara, CA
Period6/23/086/25/08

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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