Abstract

A prototype neural probe designed for chronic measurements and recordings of localized temperature field in brain has been fabricated and tested. An array of through-film vanadium oxide thermistors has been deposited onto glass and flexible 20-μm polyimide substrates. High resistivity vanadium oxide was deposited using bias target ion-beam deposition. Functioning sensors were 10 μm × 10 μm × 85-nm thick. Tested samples on glass showed a mean thermistor temperature coefficient of resistance of -4.060 ± 0.004%/°C and nominal resistance R0 of 1.3 MΩ. 1558-1748

Original languageEnglish (US)
Article number7378831
Pages (from-to)2211-2212
Number of pages2
JournalIEEE Sensors Journal
Volume16
Issue number8
DOIs
StatePublished - Apr 15 2016

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

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