A flexoelectric micro-accelerometer

Wenbin Huang, Seol Ryung Kwon, Fuh Gwo Yuan, Shujun Zhang, Xiaoning Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

In this paper new acceleration sensors using flexoelectric barium strontium titanate (BST) were designed, fabricated and tested for vibration monitoring. The flexoelectric sensors were configured as rectangular and trapezoidal cross-section micro-unimorphs with a BSTlayer bonded onto a Si substrate. Proof masses were attached to unimorph tips to amplify the transverse flexoelectric responses oftheBST layers. The theoretical model was developed and validated by vibration tests using the prototyped flexoelectric micro-unimorphs. The prototyped accelerometer showed a stable sensitivity of 0.84 pC/g in the frequency range of 100 Hz ∼ 1.6 kHz, which agreed well with the analytical results.The aging property of the flexoelectric sensor was demonstrated to be much better than that of the reported piezoelectric materials right after poling. Scaling effect analysis was performed for flexoelectric unimorphs. The test results and initial scaling effect analysis indicate that micro/nano flexoelectric sensing hold promise for a broad range of applications.

Original languageEnglish (US)
Title of host publicationASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012
Pages597-603
Number of pages7
EditionPARTS A AND B
DOIs
StatePublished - Dec 1 2012
EventASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012 - Houston, TX, United States
Duration: Nov 9 2012Nov 15 2012

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
NumberPARTS A AND B
Volume9

Other

OtherASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012
CountryUnited States
CityHouston, TX
Period11/9/1211/15/12

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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    Huang, W., Kwon, S. R., Yuan, F. G., Zhang, S., & Jiang, X. (2012). A flexoelectric micro-accelerometer. In ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012 (PARTS A AND B ed., pp. 597-603). (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 9, No. PARTS A AND B). https://doi.org/10.1115/IMECE2012-89818