A flexoelectric micro-accelerometer

Wenbin Huang, Seol Ryung Kwon, Fuh Gwo Yuan, Shujun Zhang, Xiaoning Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper new acceleration sensors using flexoelectric barium strontium titanate (BST) were designed, fabricated and tested for vibration monitoring. The flexoelectric sensors were configured as rectangular and trapezoidal cross-section micro-unimorphs with a BSTlayer bonded onto a Si substrate. Proof masses were attached to unimorph tips to amplify the transverse flexoelectric responses oftheBST layers. The theoretical model was developed and validated by vibration tests using the prototyped flexoelectric micro-unimorphs. The prototyped accelerometer showed a stable sensitivity of 0.84 pC/g in the frequency range of 100 Hz ∼ 1.6 kHz, which agreed well with the analytical results.The aging property of the flexoelectric sensor was demonstrated to be much better than that of the reported piezoelectric materials right after poling. Scaling effect analysis was performed for flexoelectric unimorphs. The test results and initial scaling effect analysis indicate that micro/nano flexoelectric sensing hold promise for a broad range of applications.

Original languageEnglish (US)
Title of host publicationASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012
Pages597-603
Number of pages7
EditionPARTS A AND B
DOIs
StatePublished - Dec 1 2012
EventASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012 - Houston, TX, United States
Duration: Nov 9 2012Nov 15 2012

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
NumberPARTS A AND B
Volume9

Other

OtherASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012
CountryUnited States
CityHouston, TX
Period11/9/1211/15/12

Fingerprint

Accelerometers
Sensors
Barium strontium titanate
Piezoelectric materials
Aging of materials
Monitoring
Substrates

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this

Huang, W., Kwon, S. R., Yuan, F. G., Zhang, S., & Jiang, X. (2012). A flexoelectric micro-accelerometer. In ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012 (PARTS A AND B ed., pp. 597-603). (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 9, No. PARTS A AND B). https://doi.org/10.1115/IMECE2012-89818
Huang, Wenbin ; Kwon, Seol Ryung ; Yuan, Fuh Gwo ; Zhang, Shujun ; Jiang, Xiaoning. / A flexoelectric micro-accelerometer. ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012. PARTS A AND B. ed. 2012. pp. 597-603 (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); PARTS A AND B).
@inproceedings{fbd7681c8d3642148369b95a25fad7d9,
title = "A flexoelectric micro-accelerometer",
abstract = "In this paper new acceleration sensors using flexoelectric barium strontium titanate (BST) were designed, fabricated and tested for vibration monitoring. The flexoelectric sensors were configured as rectangular and trapezoidal cross-section micro-unimorphs with a BSTlayer bonded onto a Si substrate. Proof masses were attached to unimorph tips to amplify the transverse flexoelectric responses oftheBST layers. The theoretical model was developed and validated by vibration tests using the prototyped flexoelectric micro-unimorphs. The prototyped accelerometer showed a stable sensitivity of 0.84 pC/g in the frequency range of 100 Hz ∼ 1.6 kHz, which agreed well with the analytical results.The aging property of the flexoelectric sensor was demonstrated to be much better than that of the reported piezoelectric materials right after poling. Scaling effect analysis was performed for flexoelectric unimorphs. The test results and initial scaling effect analysis indicate that micro/nano flexoelectric sensing hold promise for a broad range of applications.",
author = "Wenbin Huang and Kwon, {Seol Ryung} and Yuan, {Fuh Gwo} and Shujun Zhang and Xiaoning Jiang",
year = "2012",
month = "12",
day = "1",
doi = "10.1115/IMECE2012-89818",
language = "English (US)",
isbn = "9780791845257",
series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)",
number = "PARTS A AND B",
pages = "597--603",
booktitle = "ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012",
edition = "PARTS A AND B",

}

Huang, W, Kwon, SR, Yuan, FG, Zhang, S & Jiang, X 2012, A flexoelectric micro-accelerometer. in ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012. PARTS A AND B edn, ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), no. PARTS A AND B, vol. 9, pp. 597-603, ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012, Houston, TX, United States, 11/9/12. https://doi.org/10.1115/IMECE2012-89818

A flexoelectric micro-accelerometer. / Huang, Wenbin; Kwon, Seol Ryung; Yuan, Fuh Gwo; Zhang, Shujun; Jiang, Xiaoning.

ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012. PARTS A AND B. ed. 2012. p. 597-603 (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 9, No. PARTS A AND B).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - A flexoelectric micro-accelerometer

AU - Huang, Wenbin

AU - Kwon, Seol Ryung

AU - Yuan, Fuh Gwo

AU - Zhang, Shujun

AU - Jiang, Xiaoning

PY - 2012/12/1

Y1 - 2012/12/1

N2 - In this paper new acceleration sensors using flexoelectric barium strontium titanate (BST) were designed, fabricated and tested for vibration monitoring. The flexoelectric sensors were configured as rectangular and trapezoidal cross-section micro-unimorphs with a BSTlayer bonded onto a Si substrate. Proof masses were attached to unimorph tips to amplify the transverse flexoelectric responses oftheBST layers. The theoretical model was developed and validated by vibration tests using the prototyped flexoelectric micro-unimorphs. The prototyped accelerometer showed a stable sensitivity of 0.84 pC/g in the frequency range of 100 Hz ∼ 1.6 kHz, which agreed well with the analytical results.The aging property of the flexoelectric sensor was demonstrated to be much better than that of the reported piezoelectric materials right after poling. Scaling effect analysis was performed for flexoelectric unimorphs. The test results and initial scaling effect analysis indicate that micro/nano flexoelectric sensing hold promise for a broad range of applications.

AB - In this paper new acceleration sensors using flexoelectric barium strontium titanate (BST) were designed, fabricated and tested for vibration monitoring. The flexoelectric sensors were configured as rectangular and trapezoidal cross-section micro-unimorphs with a BSTlayer bonded onto a Si substrate. Proof masses were attached to unimorph tips to amplify the transverse flexoelectric responses oftheBST layers. The theoretical model was developed and validated by vibration tests using the prototyped flexoelectric micro-unimorphs. The prototyped accelerometer showed a stable sensitivity of 0.84 pC/g in the frequency range of 100 Hz ∼ 1.6 kHz, which agreed well with the analytical results.The aging property of the flexoelectric sensor was demonstrated to be much better than that of the reported piezoelectric materials right after poling. Scaling effect analysis was performed for flexoelectric unimorphs. The test results and initial scaling effect analysis indicate that micro/nano flexoelectric sensing hold promise for a broad range of applications.

UR - http://www.scopus.com/inward/record.url?scp=84887280138&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84887280138&partnerID=8YFLogxK

U2 - 10.1115/IMECE2012-89818

DO - 10.1115/IMECE2012-89818

M3 - Conference contribution

AN - SCOPUS:84887280138

SN - 9780791845257

T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

SP - 597

EP - 603

BT - ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012

ER -

Huang W, Kwon SR, Yuan FG, Zhang S, Jiang X. A flexoelectric micro-accelerometer. In ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012. PARTS A AND B ed. 2012. p. 597-603. (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); PARTS A AND B). https://doi.org/10.1115/IMECE2012-89818