A MEMS-based platform for multi-physics characterization of ultra-thin freestanding films

M. A. Haque, S. Kumar, M. T. Alam

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Micro-electro-mechanical systems (MEMS) based techniques can outperform conventional materials characterization tools in terms of specimen size and resolution. In addition, multi-functioning as well as access to analytical microscopy is also feasible for complete multi-physics characterization. We present the design and fabrication of a versatile tool that can perform mechanical, electrical and thermal characterization of nanoscale freestanding thin films. The tool is smaller than 3mm x 5mm and is compatible with virtually all types of analytical chambers. This feature allows 'in-situ' studies inside electron microscopes for real time acquisition of composition, microstructure and defect evolution and dynamics data. The unique advantage of such simultaneous acquisition of quantitative and qualitative data can be realized through accurate and quick 'observation-based' modeling of materials behavior. We present preliminary studies on multiphysics, as well as single domain characterization to demonstrate the novel experimental technique.

Original languageEnglish (US)
Title of host publicationChemical Sensors 10 -and- MEMS/NEMS 10
Pages487-494
Number of pages8
Edition12
DOIs
StatePublished - 2012
EventSymposia on Chemical Sensors 10 - Chemical and Biological Sensors and Analytical Systems and Microfabricated and Nanofabricated Systems for MEMS/NEMS 10 - 222nd ECS Meeting/PRiME 2012 - Honolulu, HI, United States
Duration: Oct 7 2012Oct 12 2012

Publication series

NameECS Transactions
Number12
Volume50
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherSymposia on Chemical Sensors 10 - Chemical and Biological Sensors and Analytical Systems and Microfabricated and Nanofabricated Systems for MEMS/NEMS 10 - 222nd ECS Meeting/PRiME 2012
CountryUnited States
CityHonolulu, HI
Period10/7/1210/12/12

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Haque, M. A., Kumar, S., & Alam, M. T. (2012). A MEMS-based platform for multi-physics characterization of ultra-thin freestanding films. In Chemical Sensors 10 -and- MEMS/NEMS 10 (12 ed., pp. 487-494). (ECS Transactions; Vol. 50, No. 12). https://doi.org/10.1149/05012.0487ecst