A method for the fabrication of sculptured thin films of periodic arrays of standing nanorods

Hirofumi Tanaka, Mark William Horn, Paul S. Weiss

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A simple method for the fabrication of sculptured thin films (STFs) of periodic arrays of high-aspect-ratio (20:1) standing nanorods on silicon substrates is described. It is based on oblique evaporation onto periodically arranged arrays of "mini-rod" topography using a rotating sample stage. 1 Recently, it has been shown that these nanostructures can be prepared on relatively large areas and at low cost, making the method suitable for technological applications. 2

Original languageEnglish (US)
Pages (from-to)3799-3802
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume6
Issue number12
DOIs
StatePublished - Dec 2006

Fingerprint

Nanotubes
Silicon
Nanorods
Topography
nanorods
Aspect ratio
Nanostructures
Evaporation
Fabrication
Thin films
fabrication
Substrates
thin films
high aspect ratio
Costs
topography
rods
evaporation
Costs and Cost Analysis
silicon

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

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A method for the fabrication of sculptured thin films of periodic arrays of standing nanorods. / Tanaka, Hirofumi; Horn, Mark William; Weiss, Paul S.

In: Journal of Nanoscience and Nanotechnology, Vol. 6, No. 12, 12.2006, p. 3799-3802.

Research output: Contribution to journalArticle

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