A method for the fabrication of sculptured thin films of periodic arrays of standing nanorods

Hirofumi Tanaka, Mark W. Horn, Paul S. Weiss

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

A simple method for the fabrication of sculptured thin films (STFs) of periodic arrays of high-aspect-ratio (20:1) standing nanorods on silicon substrates is described. It is based on oblique evaporation onto periodically arranged arrays of "mini-rod" topography using a rotating sample stage. 1 Recently, it has been shown that these nanostructures can be prepared on relatively large areas and at low cost, making the method suitable for technological applications. 2

Original languageEnglish (US)
Pages (from-to)3799-3802
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume6
Issue number12
DOIs
StatePublished - Dec 1 2006

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

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