A miniature, high-sensitivity, electron tunneling accelerometer

Howard K. Rockstad, T. K. Tang, J. K. Reynolds, T. W. Kenny, W. J. Kaiser, Thomas B. Gabrielson

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g (Hz)-1/2 or less between 10 and 200 Hz, and close to 10-8 g (Hz)-1/2 near the resonance frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm3 volume with a mass of 8 g.

Original languageEnglish (US)
Pages (from-to)227-231
Number of pages5
JournalSensors and Actuators, A: Physical
Volume53
Issue number1-3
DOIs
StatePublished - Jan 1 1996

Fingerprint

Electron tunneling
accelerometers
electron tunneling
Accelerometers
Transducers
transducers
prototypes
sensitivity
Underwater acoustics
underwater acoustics
directivity
low noise

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Rockstad, Howard K. ; Tang, T. K. ; Reynolds, J. K. ; Kenny, T. W. ; Kaiser, W. J. ; Gabrielson, Thomas B. / A miniature, high-sensitivity, electron tunneling accelerometer. In: Sensors and Actuators, A: Physical. 1996 ; Vol. 53, No. 1-3. pp. 227-231.
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A miniature, high-sensitivity, electron tunneling accelerometer. / Rockstad, Howard K.; Tang, T. K.; Reynolds, J. K.; Kenny, T. W.; Kaiser, W. J.; Gabrielson, Thomas B.

In: Sensors and Actuators, A: Physical, Vol. 53, No. 1-3, 01.01.1996, p. 227-231.

Research output: Contribution to journalArticle

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