A model for deposition of metal vapors from multiple targets on a cylindrical substrate

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper addresses a challenging problem of developing technology for heat exchanger tubes embedded in ceramic composite matrix. Functionally graded composite tubes, made using physical vapor deposition (PVD) process, are required to have diffusion barrier layers, withstand high temperature, and be impermeable to hydrogen. The work addresses mathematical modeling of the deposition of metallic vapors from multiple targets on a cylindrical substrate to simulate the PVD process in manufacturing such tubes. Materials used for the deposition are Molybdenum and Niobium because they have shown good formability, strength, toughness and ductility over a wide range of temperatures. Commercially available software FLUENT was used to model the process. Prediction of condensation of vapors from metal ingots occurs in varying proportion along the circumference of the tube, resulting in submicron layers of different materials of varying thicknesses being ingrained into each other. Results are presented for patterns of materials showing continuously changing relative concentration of deposited metals over a stationary and rotating cylindrical substrate.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages307-312
Number of pages6
ISBN (Print)9780791843871
DOIs
StatePublished - Jan 1 2010
Event2009 ASME International Mechanical Engineering Congress and Exposition, IMECE2009 - Lake Buena Vista, FL, United States
Duration: Nov 13 2009Nov 19 2009

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings
Volume14

Other

Other2009 ASME International Mechanical Engineering Congress and Exposition, IMECE2009
CountryUnited States
CityLake Buena Vista, FL
Period11/13/0911/19/09

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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    Singh, L., Kulkarni, A. K., & Singh, J. (2010). A model for deposition of metal vapors from multiple targets on a cylindrical substrate. In Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009 (pp. 307-312). (ASME International Mechanical Engineering Congress and Exposition, Proceedings; Vol. 14). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2009-10637