A multivariate double EWMA process adjustment scheme for drifting processes

Enrique Del Castillo, Ramkumar Rajagopal

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The “predictor-corrector” feedback controller, a process adjustment scheme proposed for semiconductor manufacturing run-to-run processes that drift, is extended to the multiple-input-multiple-output case. The controller is based on two coupled multivariate Exponentially-Weighted-Moving-Average (EWMA) equations, thus its performance depends on the choices of EWMA weight matrices. Stability conditions are given for a pure gain process adjusted with a MIMO double EWMA (EWMA) controller. It is shown that the stability conditions are invariant with respect to various realistic drift disturbance models. Recommendations on how to choose the EWMA weight matrices are given. An analysis is conducted to assess the impact of errors in the estimates of the process gains. The proposed MIMO EWMA feedback controller is compared to the common practice of using multiple single-input-single-ouput dEWMA controllers running in parallel.

Original languageEnglish (US)
Pages (from-to)1055-1068
Number of pages14
JournalIIE Transactions (Institute of Industrial Engineers)
Volume34
Issue number12
DOIs
StatePublished - Dec 2002

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Controllers
MIMO systems
Feedback
Semiconductor materials

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

Cite this

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A multivariate double EWMA process adjustment scheme for drifting processes. / Castillo, Enrique Del; Rajagopal, Ramkumar.

In: IIE Transactions (Institute of Industrial Engineers), Vol. 34, No. 12, 12.2002, p. 1055-1068.

Research output: Contribution to journalArticle

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