A new type of microphone using flexoelectric barium strontium titnate

Seol Ryung Kwon, Wenbin Huang, Shujun Zhang, Fuh Gwo Yuan, Xiaoning Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

A flexoelectric bridge-structured microphone using bulk barium strontium titanate (Ba0.65Sr0.35TiO3 or BST) ceramic was investigated in this study. The flexoelectric microphone was installed in an anechoic box and exposed to the sound pressure emitted from a loud speaker. Charge sensitivity of the flexoelectric microphone was measured and calibrated using a reference microphone. The 1.5 mm×768 μm×50 μm micro-machined bridge-structured flexoelectric microphone has a sensitivity of 0.92 pC/Pa, while its resonance frequency was calculated to be 98.67 kHz. The analytical and experimental results show that the flexoelectric microphone has both high sensitivity and broad bandwidth, indicating that flexoelectric microphones are potential candidates for many applications.

Original languageEnglish (US)
Title of host publicationSmart Sensor Phenomena, Technology, Networks, and Systems Integration 2014
PublisherSPIE
ISBN (Print)9780819499882
DOIs
Publication statusPublished - Jan 1 2014
EventSmart Sensor Phenomena, Technology, Networks, and Systems Integration 2014 - San Diego, CA, United States
Duration: Mar 10 2014Mar 11 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9062
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherSmart Sensor Phenomena, Technology, Networks, and Systems Integration 2014
CountryUnited States
CitySan Diego, CA
Period3/10/143/11/14

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Kwon, S. R., Huang, W., Zhang, S., Yuan, F. G., & Jiang, X. (2014). A new type of microphone using flexoelectric barium strontium titnate. In Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014 [90620Y] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9062). SPIE. https://doi.org/10.1117/12.2045072