A new type of microphone using flexoelectric barium strontium titnate

Seol Ryung Kwon; Wenbin Huang; Shujun Zhang; Fuh Gwo Yuan; Xiaoning Jiang

doi:10.1117/12.2045072

A new type of microphone using flexoelectric barium strontium titnate

Seol Ryung Kwon, Wenbin Huang, Shujun Zhang, Fuh Gwo Yuan, Xiaoning Jiang

Materials Research Institute (MRI)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

A flexoelectric bridge-structured microphone using bulk barium strontium titanate (Ba_0.65Sr_0.35TiO₃ or BST) ceramic was investigated in this study. The flexoelectric microphone was installed in an anechoic box and exposed to the sound pressure emitted from a loud speaker. Charge sensitivity of the flexoelectric microphone was measured and calibrated using a reference microphone. The 1.5 mm×768 μm×50 μm micro-machined bridge-structured flexoelectric microphone has a sensitivity of 0.92 pC/Pa, while its resonance frequency was calculated to be 98.67 kHz. The analytical and experimental results show that the flexoelectric microphone has both high sensitivity and broad bandwidth, indicating that flexoelectric microphones are potential candidates for many applications.

Original language	English (US)
Title of host publication	Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014
Publisher	SPIE
ISBN (Print)	9780819499882
DOIs	https://doi.org/10.1117/12.2045072
State	Published - 2014
Event	Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014 - San Diego, CA, United States Duration: Mar 10 2014 → Mar 11 2014

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9062
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Other

Other	Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014
Country/Territory	United States
City	San Diego, CA
Period	3/10/14 → 3/11/14

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2045072

Cite this

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title = "A new type of microphone using flexoelectric barium strontium titnate",

abstract = "A flexoelectric bridge-structured microphone using bulk barium strontium titanate (Ba0.65Sr0.35TiO3 or BST) ceramic was investigated in this study. The flexoelectric microphone was installed in an anechoic box and exposed to the sound pressure emitted from a loud speaker. Charge sensitivity of the flexoelectric microphone was measured and calibrated using a reference microphone. The 1.5 mm×768 μm×50 μm micro-machined bridge-structured flexoelectric microphone has a sensitivity of 0.92 pC/Pa, while its resonance frequency was calculated to be 98.67 kHz. The analytical and experimental results show that the flexoelectric microphone has both high sensitivity and broad bandwidth, indicating that flexoelectric microphones are potential candidates for many applications.",

author = "Kwon, {Seol Ryung} and Wenbin Huang and Shujun Zhang and Yuan, {Fuh Gwo} and Xiaoning Jiang",

year = "2014",

doi = "10.1117/12.2045072",

language = "English (US)",

isbn = "9780819499882",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

booktitle = "Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014",

address = "United States",

}

Kwon, SR, Huang, W, Zhang, S, Yuan, FG & Jiang, X 2014, A new type of microphone using flexoelectric barium strontium titnate. in Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014., 90620Y, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9062, SPIE, Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014, San Diego, CA, United States, 3/10/14. https://doi.org/10.1117/12.2045072

A new type of microphone using flexoelectric barium strontium titnate. / Kwon, Seol Ryung; Huang, Wenbin; Zhang, Shujun; Yuan, Fuh Gwo; Jiang, Xiaoning.

Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014. SPIE, 2014. 90620Y (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9062).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - A new type of microphone using flexoelectric barium strontium titnate

AU - Kwon, Seol Ryung

AU - Huang, Wenbin

AU - Zhang, Shujun

AU - Yuan, Fuh Gwo

AU - Jiang, Xiaoning

PY - 2014

Y1 - 2014

N2 - A flexoelectric bridge-structured microphone using bulk barium strontium titanate (Ba0.65Sr0.35TiO3 or BST) ceramic was investigated in this study. The flexoelectric microphone was installed in an anechoic box and exposed to the sound pressure emitted from a loud speaker. Charge sensitivity of the flexoelectric microphone was measured and calibrated using a reference microphone. The 1.5 mm×768 μm×50 μm micro-machined bridge-structured flexoelectric microphone has a sensitivity of 0.92 pC/Pa, while its resonance frequency was calculated to be 98.67 kHz. The analytical and experimental results show that the flexoelectric microphone has both high sensitivity and broad bandwidth, indicating that flexoelectric microphones are potential candidates for many applications.

AB - A flexoelectric bridge-structured microphone using bulk barium strontium titanate (Ba0.65Sr0.35TiO3 or BST) ceramic was investigated in this study. The flexoelectric microphone was installed in an anechoic box and exposed to the sound pressure emitted from a loud speaker. Charge sensitivity of the flexoelectric microphone was measured and calibrated using a reference microphone. The 1.5 mm×768 μm×50 μm micro-machined bridge-structured flexoelectric microphone has a sensitivity of 0.92 pC/Pa, while its resonance frequency was calculated to be 98.67 kHz. The analytical and experimental results show that the flexoelectric microphone has both high sensitivity and broad bandwidth, indicating that flexoelectric microphones are potential candidates for many applications.

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

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PB - SPIE

T2 - Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014

Y2 - 10 March 2014 through 11 March 2014

ER -

A new type of microphone using flexoelectric barium strontium titnate

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