To more accurately describe the noncontact transport behavior of traveling acoustic waves, a nonlinear model is presented in this paper for the squeeze gas film with consideration of gas inertia in the case of a large amplitude motion and low viscosity of the gas. A closed form solution is derived for the vertical and horizontal forces of the film from this model. Our results have shown that the gas inertia has a significant influence on the pressure distribution in the squeeze film, and the inertial force is higher than the viscous force. The predicted levitation and horizontal driving forces are found to be in good agreement with our experimental measurements. Our inertia model provides a powerful tool for the force estimation and its potential benefits could be far reaching. The accurate prediction of these forces is useful to design the system for levitating and transporting planar objects, such as MEMS devices, glass substrates, and IC chips.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)