A novel MEMS nano-tribometer for dynamic testing in-situ in sem and tem

A. V. Desai, Md Amanul Haque

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present the design and fabrication of a microelectro-mechanical (MEMS) tribomcter with normal and lateral force resolutions of 100 and 1 nano-Newton respectively and bandwidth of 50 kHz. The small size of the tribometer (2 × 2 × 0.3 mm) allows simultaneously quantitative and qualitative dynamic testing in electron microscopes.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
Pages1617-1624
Number of pages8
EditionPART B
StatePublished - Dec 1 2004
Event2004 ASME/STLE International Joint Tribology Conference - Long Beach, CA, United States
Duration: Oct 24 2004Oct 27 2004

Publication series

NameProceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
NumberPART B

Other

Other2004 ASME/STLE International Joint Tribology Conference
CountryUnited States
CityLong Beach, CA
Period10/24/0410/27/04

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • Cite this

    Desai, A. V., & Haque, M. A. (2004). A novel MEMS nano-tribometer for dynamic testing in-situ in sem and tem. In Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004 (PART B ed., pp. 1617-1624). (Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004; No. PART B).