We present the design and fabrication of a micro-electro-mechanical (MEMS) tribometer with normal and lateral force resolutions of 100 and 1 nano-Newton, respectively and bandwidth of 50 kHz. The small size of the tribometer (2 × 2 × 0.3 mm) allows simultaneously quantitative and qualitative dynamic testing in electron microscopes.
All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering
- Surfaces and Interfaces
- Surfaces, Coatings and Films