A novel MEMS nano-tribometer for dynamic testing in-situ in SEM and TEM

A. V. Desai, M. A. Haque

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

We present the design and fabrication of a micro-electro-mechanical (MEMS) tribometer with normal and lateral force resolutions of 100 and 1 nano-Newton, respectively and bandwidth of 50 kHz. The small size of the tribometer (2 × 2 × 0.3 mm) allows simultaneously quantitative and qualitative dynamic testing in electron microscopes.

Original languageEnglish (US)
Pages (from-to)13-19
Number of pages7
JournalTribology Letters
Volume18
Issue number1
DOIs
StatePublished - Jan 2005

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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