A Photoacoustic Imaging Device Using Piezoelectric Micromachined Ultrasound Transducers (PMUTs)

Ajay Dangi, Christopher Y. Cheng, Sumit Agrawal, Sudhanshu Tiwari, Gaurav Ramesh Datta, Robert R. Benoit, Rudra Pratap, Susan Trolier-Mckinstry, Sri Rajasekhar Kothapalli

Research output: Contribution to journalArticle

Abstract

A linear piezoelectric micromachined ultrasound transducer (PMUT) array was fabricated and integrated into a device for photoacoustic imaging (PAI) of tissue phantoms. The PMUT contained 65 array elements, with each element having 60 diaphragms of 60μm diameter and 75μm pitch. A lead zirconate titanate (PZT) thin film was used as the piezoelectric layer. The in-air vibration response of the PMUT array elements showed a first mode resonance between 6 and 8 MHz. Hydrophone measurements showed 16.2 kPa average peak ultrasound pressure output at 7.5 mm from one element excited with 5 Vpp input. A receive sensitivity of ∼0.48 mV/kPa was observed for a PMUT array element with 0 dB gain. The PMUT array was bonded to a custom-printed circuit board to enable compact integration with an optical fiber bundle for PAI. A broad photoacoustic bandwidth of ~89% was observed for the photoacoustic response captured from absorbing pencil lead targets. Linear scanning of a single element of a PMUT array was performed on different tissue phantoms embedded with light-absorbing targets to successfully demonstrate B-mode PAI using PMUTs.

Original languageEnglish (US)
Article number8915732
Pages (from-to)801-809
Number of pages9
JournalIEEE transactions on ultrasonics, ferroelectrics, and frequency control
Volume67
Issue number4
DOIs
StatePublished - Apr 2020

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'A Photoacoustic Imaging Device Using Piezoelectric Micromachined Ultrasound Transducers (PMUTs)'. Together they form a unique fingerprint.

  • Cite this