A programmable nanoreplica molding for the fabrication of nanophotonic devices

Longju Liu, Jingxiang Zhang, Mohsin Ali Badshah, Liang Dong, Jingjing Li, Seok Min Kim, Meng Lu

Research output: Contribution to journalArticlepeer-review

11 Scopus citations


The ability to fabricate periodic structures with sub-wavelength features has a great potential for impact on integrated optics, optical sensors, and photovoltaic devices. Here, we report a programmable nanoreplica molding process to fabricate a variety of sub-micrometer periodic patterns using a single mold. The process utilizes a stretchable mold to produce the desired periodic structure in a photopolymer on glass or plastic substrates. During the replica molding process, a uniaxial force is applied to the mold and results in changes of the periodic structure, which resides on the surface of the mold. Direction and magnitude of the force determine the array geometry, including the lattice constant and arrangement. By stretching the mold, 2D arrays with square, rectangular, and triangular lattice structures can be fabricated. As one example, we present a plasmonic crystal device with surface plasmon resonances determined by the force applied during molding. In addition, photonic crystal slabs with different array patterns are fabricated and characterized. This unique process offers the capability of generating various periodic nanostructures rapidly and inexpensively.

Original languageEnglish (US)
Article number22445
JournalScientific reports
StatePublished - Mar 1 2016

All Science Journal Classification (ASJC) codes

  • General


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