A programmable nanoreplica molding for the fabrication of nanophotonic devices

Longju Liu, Jingxiang Zhang, Mohsin Ali Badshah, Liang Dong, Jingjing Li, Seok Min Kim, Meng Lu

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

The ability to fabricate periodic structures with sub-wavelength features has a great potential for impact on integrated optics, optical sensors, and photovoltaic devices. Here, we report a programmable nanoreplica molding process to fabricate a variety of sub-micrometer periodic patterns using a single mold. The process utilizes a stretchable mold to produce the desired periodic structure in a photopolymer on glass or plastic substrates. During the replica molding process, a uniaxial force is applied to the mold and results in changes of the periodic structure, which resides on the surface of the mold. Direction and magnitude of the force determine the array geometry, including the lattice constant and arrangement. By stretching the mold, 2D arrays with square, rectangular, and triangular lattice structures can be fabricated. As one example, we present a plasmonic crystal device with surface plasmon resonances determined by the force applied during molding. In addition, photonic crystal slabs with different array patterns are fabricated and characterized. This unique process offers the capability of generating various periodic nanostructures rapidly and inexpensively.

Original languageEnglish (US)
Article number22445
JournalScientific reports
Volume6
DOIs
StatePublished - Mar 1 2016

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fabrication
photopolymers
integrated optics
optical measuring instruments
replicas
surface plasmon resonance
crystals
micrometers
slabs
plastics
photonics
glass
geometry
wavelengths

All Science Journal Classification (ASJC) codes

  • General

Cite this

Liu, Longju ; Zhang, Jingxiang ; Badshah, Mohsin Ali ; Dong, Liang ; Li, Jingjing ; Kim, Seok Min ; Lu, Meng. / A programmable nanoreplica molding for the fabrication of nanophotonic devices. In: Scientific reports. 2016 ; Vol. 6.
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A programmable nanoreplica molding for the fabrication of nanophotonic devices. / Liu, Longju; Zhang, Jingxiang; Badshah, Mohsin Ali; Dong, Liang; Li, Jingjing; Kim, Seok Min; Lu, Meng.

In: Scientific reports, Vol. 6, 22445, 01.03.2016.

Research output: Contribution to journalArticle

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