A novel square-plate piezoelectric ultrasonic linear motor operated in two orthogonal first bending vibration modes (B1) is proposed. The piezoelectric vibrator of the linear motor is simply made of a single PZT ceramic plate (sizes: 15 x 15 x 2 mm) and poled in its thickness direction. The top surface electrode of the square ceramic plate was divided into four active areas along its two diagonal lines for exciting two orthogonal B1 modes. The achieved driving force and speed from the linear motor are 1.8 N and 230 mm/s, respectively, under one pair orthogonal voltage drive of 150 V p-p at the resonance frequency of 92 kHz. The proposed linear motor has advantages over conventional ultrasonic linear motors, such as relatively larger driving force, very simple working mode and structure, and low fabrication cost.
|Original language||English (US)|
|Number of pages||6|
|Journal||IEEE transactions on ultrasonics, ferroelectrics, and frequency control|
|State||Published - Jan 11 2013|
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
- Acoustics and Ultrasonics