A study of target heating in low-energy ion-beam processing

S. A. Ringel, X. C. Mu, S. J. Fonash, S. Ashok

Research output: Contribution to journalComment/debatepeer-review

7 Scopus citations
Original languageEnglish (US)
Pages (from-to)2385-2388
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume4
Issue number5
DOIs
StatePublished - Sep 1986

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this