A two degrees-of-freedom piezoelectric single-crystal micromotor

Zhijiang Chen, Xiaotian Li, Guoxi Liu, Shuxiang Dong

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

A two degrees-of-freedom (DOF) ultrasonic micromotor made of piezoelectric Pb(In1/2Nb1/2) O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 (PIN-PMN-PT) single crystal square-bar (dimensions 2 × 2 × 9 mm3) was developed. The PIN-PMN-PT square-bar stator can generate standing wave elliptical motions in two orthogonal vertical planes by combining the first longitudinal and second bending vibration modes, enabling it to drive a slider in two orthogonal directions. The relatively large driving forces of 0.25 N and motion speed of 35 mm/s were obtained under a voltage of 80 Vpp at its resonance frequency of 87.5 kHz. The proposed micromotor has potential for applications in micro robots, cell manipulators, and digital cameras as a two-DOF actuator.

Original languageEnglish (US)
Article number224101
JournalJournal of Applied Physics
Volume116
Issue number22
DOIs
StatePublished - Dec 14 2014

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micromotors
piezoelectric crystals
degrees of freedom
bending vibration
digital cameras
single crystals
stators
robots
standing waves
chutes
manipulators
vibration mode
ultrasonics
actuators
electric potential
cells

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Chen, Zhijiang ; Li, Xiaotian ; Liu, Guoxi ; Dong, Shuxiang. / A two degrees-of-freedom piezoelectric single-crystal micromotor. In: Journal of Applied Physics. 2014 ; Vol. 116, No. 22.
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A two degrees-of-freedom piezoelectric single-crystal micromotor. / Chen, Zhijiang; Li, Xiaotian; Liu, Guoxi; Dong, Shuxiang.

In: Journal of Applied Physics, Vol. 116, No. 22, 224101, 14.12.2014.

Research output: Contribution to journalArticle

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