A two-layer linear piezoelectric micromotor

Xiaotian Li, Penghong Ci, Guoxi Liu, Shuxiang Dong

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

A first bending (B1) mode two-layer piezoelectric ultrasonic linear micromotor has been developed for microoptics driving applications. The piezo-vibrator of the micromotor was composed of two small Pb(Zr,Ti)O3 (PZT-5) plates, with overall dimensions and mass of only 2.0 × 2.0 × 5.0 mm3 and 0.2 g, respectively. The proposed micromotor could operate either in single-phase voltage (standing wave) mode or two-phase voltage (traveling wave) mode to drive a slider via friction force to provide bidirectional linear motion. A large thrust of up to 0.30 N, which corresponds to a high unit volume direct driving force of 15 mN/mm3, and a linear movement velocity of up to 230 mm/s were obtained under an applied voltage of 80 Vpp at the B1 mode resonance frequency of 174 kHz.

Original languageEnglish (US)
Article number7055435
Pages (from-to)405-411
Number of pages7
JournalIEEE transactions on ultrasonics, ferroelectrics, and frequency control
Volume62
Issue number3
DOIs
StatePublished - Jan 1 2015

Fingerprint

micromotors
Micromotors
Electric potential
electric potential
modes (standing waves)
Microoptics
Vibrators
chutes
traveling waves
thrust
friction
ultrasonics
Ultrasonics
Friction

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

Cite this

Li, Xiaotian ; Ci, Penghong ; Liu, Guoxi ; Dong, Shuxiang. / A two-layer linear piezoelectric micromotor. In: IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2015 ; Vol. 62, No. 3. pp. 405-411.
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A two-layer linear piezoelectric micromotor. / Li, Xiaotian; Ci, Penghong; Liu, Guoxi; Dong, Shuxiang.

In: IEEE transactions on ultrasonics, ferroelectrics, and frequency control, Vol. 62, No. 3, 7055435, 01.01.2015, p. 405-411.

Research output: Contribution to journalArticle

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