A way to higher resolution: Spherical-aberration correction in a 200 kV transmission electron microscope

Knut Urban, Bernd Kabius, Max Haider, Harald Rose

Research output: Contribution to journalArticle

41 Scopus citations

Abstract

A double hexapole corrector system was constructed for compensation of the spherical aberration of the objective lens of a transmission electron microscope. By implementing this system on a commercial 200 kV instrument with a field emission gun, the spherical aberration correction was demonstrated and an improvement of the point resolution from 0.24 to 0.13 nm was realized. Applying the new instrument to structure studies on Si/CoSi2 interfaces it was demonstrated that an outstanding additional advantage of aberration correction is the substantially reduced contrast delocalization in high-resolution images.

Original languageEnglish (US)
Pages (from-to)821-826
Number of pages6
JournalJournal of Electron Microscopy
Volume48
Issue number6
DOIs
StatePublished - Jan 1 1999

All Science Journal Classification (ASJC) codes

  • Instrumentation

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