Active-matrix pixelized well detectors on polymeric substrates

Jiunn Ru Huang, Weidong Qian, Hagen Klauk, Thomas Nelson Jackson, Kevin Black, Philip Deines-Jones, Stanley D. Hunter

Research output: Contribution to conferencePaper

3 Citations (Scopus)

Abstract

There is currently considerable interest in the fabrication of lightweight, large-area information displays, detectors, imaging sensors, and flexible electronic circuits. We have developed a process to fabricate thin-film amorphous silicon (a-Si) based active-matrix pixelized well detectors on polymeric substrates. Thin-film a-Si is inherently lightweight and can be deposited over very large areas. Electronic devices made by a-Si are typically made on rigid substrates such as glass plates, however, glass substrates are heavy, rigid, and fragile. Alternative substrates such as polymeric films are of interest for a variety of applications, including rugged active-matrix flat panel displays, lightweight spacecraft solar arrays, and flexible imaging sensors. Recently, we have demonstrated a-Si photovoltaic cells, a-Si thin-film transistors (TFTs), and integrated a-Si TFT circuits on flexible Kapton polyimide substrates with characteristics similar to devices made on glass substrates. Here we report on a flat-panel detector for X-rays and charged particles generated by gamma rays, which uses an array of microelectromechanical (MEMS) - like detector structures integrated with a-Si TFTs on a polymeric substrate.

Original languageEnglish (US)
Pages476-482
Number of pages7
StatePublished - Dec 1 2000
EventIEEE 2000 National Aerospace and Electronics Conference (NAECON 2000) - Dayton, OH, USA
Duration: Oct 10 2000Oct 12 2000

Other

OtherIEEE 2000 National Aerospace and Electronics Conference (NAECON 2000)
CityDayton, OH, USA
Period10/10/0010/12/00

Fingerprint

Amorphous silicon
Detectors
Substrates
Thin film transistors
Glass
Flexible electronics
Imaging techniques
Thin films
Flat panel displays
Networks (circuits)
Photovoltaic cells
Sensors
Charged particles
Polymer films
Polyimides
Gamma rays
MEMS
Spacecraft
Display devices
Fabrication

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Huang, J. R., Qian, W., Klauk, H., Jackson, T. N., Black, K., Deines-Jones, P., & Hunter, S. D. (2000). Active-matrix pixelized well detectors on polymeric substrates. 476-482. Paper presented at IEEE 2000 National Aerospace and Electronics Conference (NAECON 2000), Dayton, OH, USA, .
Huang, Jiunn Ru ; Qian, Weidong ; Klauk, Hagen ; Jackson, Thomas Nelson ; Black, Kevin ; Deines-Jones, Philip ; Hunter, Stanley D. / Active-matrix pixelized well detectors on polymeric substrates. Paper presented at IEEE 2000 National Aerospace and Electronics Conference (NAECON 2000), Dayton, OH, USA, .7 p.
@conference{f50e96c098aa497583bacc37c3826ba2,
title = "Active-matrix pixelized well detectors on polymeric substrates",
abstract = "There is currently considerable interest in the fabrication of lightweight, large-area information displays, detectors, imaging sensors, and flexible electronic circuits. We have developed a process to fabricate thin-film amorphous silicon (a-Si) based active-matrix pixelized well detectors on polymeric substrates. Thin-film a-Si is inherently lightweight and can be deposited over very large areas. Electronic devices made by a-Si are typically made on rigid substrates such as glass plates, however, glass substrates are heavy, rigid, and fragile. Alternative substrates such as polymeric films are of interest for a variety of applications, including rugged active-matrix flat panel displays, lightweight spacecraft solar arrays, and flexible imaging sensors. Recently, we have demonstrated a-Si photovoltaic cells, a-Si thin-film transistors (TFTs), and integrated a-Si TFT circuits on flexible Kapton polyimide substrates with characteristics similar to devices made on glass substrates. Here we report on a flat-panel detector for X-rays and charged particles generated by gamma rays, which uses an array of microelectromechanical (MEMS) - like detector structures integrated with a-Si TFTs on a polymeric substrate.",
author = "Huang, {Jiunn Ru} and Weidong Qian and Hagen Klauk and Jackson, {Thomas Nelson} and Kevin Black and Philip Deines-Jones and Hunter, {Stanley D.}",
year = "2000",
month = "12",
day = "1",
language = "English (US)",
pages = "476--482",
note = "IEEE 2000 National Aerospace and Electronics Conference (NAECON 2000) ; Conference date: 10-10-2000 Through 12-10-2000",

}

Huang, JR, Qian, W, Klauk, H, Jackson, TN, Black, K, Deines-Jones, P & Hunter, SD 2000, 'Active-matrix pixelized well detectors on polymeric substrates', Paper presented at IEEE 2000 National Aerospace and Electronics Conference (NAECON 2000), Dayton, OH, USA, 10/10/00 - 10/12/00 pp. 476-482.

Active-matrix pixelized well detectors on polymeric substrates. / Huang, Jiunn Ru; Qian, Weidong; Klauk, Hagen; Jackson, Thomas Nelson; Black, Kevin; Deines-Jones, Philip; Hunter, Stanley D.

2000. 476-482 Paper presented at IEEE 2000 National Aerospace and Electronics Conference (NAECON 2000), Dayton, OH, USA, .

Research output: Contribution to conferencePaper

TY - CONF

T1 - Active-matrix pixelized well detectors on polymeric substrates

AU - Huang, Jiunn Ru

AU - Qian, Weidong

AU - Klauk, Hagen

AU - Jackson, Thomas Nelson

AU - Black, Kevin

AU - Deines-Jones, Philip

AU - Hunter, Stanley D.

PY - 2000/12/1

Y1 - 2000/12/1

N2 - There is currently considerable interest in the fabrication of lightweight, large-area information displays, detectors, imaging sensors, and flexible electronic circuits. We have developed a process to fabricate thin-film amorphous silicon (a-Si) based active-matrix pixelized well detectors on polymeric substrates. Thin-film a-Si is inherently lightweight and can be deposited over very large areas. Electronic devices made by a-Si are typically made on rigid substrates such as glass plates, however, glass substrates are heavy, rigid, and fragile. Alternative substrates such as polymeric films are of interest for a variety of applications, including rugged active-matrix flat panel displays, lightweight spacecraft solar arrays, and flexible imaging sensors. Recently, we have demonstrated a-Si photovoltaic cells, a-Si thin-film transistors (TFTs), and integrated a-Si TFT circuits on flexible Kapton polyimide substrates with characteristics similar to devices made on glass substrates. Here we report on a flat-panel detector for X-rays and charged particles generated by gamma rays, which uses an array of microelectromechanical (MEMS) - like detector structures integrated with a-Si TFTs on a polymeric substrate.

AB - There is currently considerable interest in the fabrication of lightweight, large-area information displays, detectors, imaging sensors, and flexible electronic circuits. We have developed a process to fabricate thin-film amorphous silicon (a-Si) based active-matrix pixelized well detectors on polymeric substrates. Thin-film a-Si is inherently lightweight and can be deposited over very large areas. Electronic devices made by a-Si are typically made on rigid substrates such as glass plates, however, glass substrates are heavy, rigid, and fragile. Alternative substrates such as polymeric films are of interest for a variety of applications, including rugged active-matrix flat panel displays, lightweight spacecraft solar arrays, and flexible imaging sensors. Recently, we have demonstrated a-Si photovoltaic cells, a-Si thin-film transistors (TFTs), and integrated a-Si TFT circuits on flexible Kapton polyimide substrates with characteristics similar to devices made on glass substrates. Here we report on a flat-panel detector for X-rays and charged particles generated by gamma rays, which uses an array of microelectromechanical (MEMS) - like detector structures integrated with a-Si TFTs on a polymeric substrate.

UR - http://www.scopus.com/inward/record.url?scp=0034427605&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034427605&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0034427605

SP - 476

EP - 482

ER -

Huang JR, Qian W, Klauk H, Jackson TN, Black K, Deines-Jones P et al. Active-matrix pixelized well detectors on polymeric substrates. 2000. Paper presented at IEEE 2000 National Aerospace and Electronics Conference (NAECON 2000), Dayton, OH, USA, .