Adhesion aspects in MEMS/NEMS

S. H. Kim, M. T. Dugger, K. L. Mittal

Research output: Book/ReportBook

2 Scopus citations

Abstract

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects.

Original languageEnglish (US)
PublisherCRC Press
Number of pages409
ISBN (Electronic)9789004190955
ISBN (Print)9789004190948
StatePublished - Jan 1 2011

All Science Journal Classification (ASJC) codes

  • Chemistry(all)

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    Kim, S. H., Dugger, M. T., & Mittal, K. L. (2011). Adhesion aspects in MEMS/NEMS. CRC Press.