Advances in nanolithography using molecular rulers

M. E. Anderson, L. P. Tan, H. Tanaka, M. Mihok, H. Lee, M. W. Horn, P. S. Weiss

Research output: Contribution to journalArticlepeer-review

32 Scopus citations
Original languageEnglish (US)
Pages (from-to)3116-3119
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
StatePublished - 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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