Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering

Dan Ye, Sintu Rongpipi, Joshua H. Litofsky, Youngmin Lee, Tyler E. Culp, Sang Ha Yoo, Thomas N. Jackson, Cheng Wang, Esther W. Gomez, Enrique D. Gomez

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si 3 N 4 and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al 2 O 3 free-standing films for use as RSoXS windows. Al 2 O 3 films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al 2 O 3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si 3 N 4 substrates.

Original languageEnglish (US)
Pages (from-to)224-228
Number of pages5
JournalMRS Communications
Issue number1
StatePublished - Mar 1 2019

All Science Journal Classification (ASJC) codes

  • Materials Science(all)


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