Abstract
Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si 3 N 4 and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al 2 O 3 free-standing films for use as RSoXS windows. Al 2 O 3 films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al 2 O 3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si 3 N 4 substrates.
Original language | English (US) |
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Pages (from-to) | 224-228 |
Number of pages | 5 |
Journal | MRS Communications |
Volume | 9 |
Issue number | 1 |
DOIs | |
State | Published - Mar 1 2019 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)