Abstract
Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si 3 N 4 and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al 2 O 3 free-standing films for use as RSoXS windows. Al 2 O 3 films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al 2 O 3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si 3 N 4 substrates.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 224-228 |
| Number of pages | 5 |
| Journal | MRS Communications |
| Volume | 9 |
| Issue number | 1 |
| DOIs | |
| State | Published - Mar 1 2019 |
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All Science Journal Classification (ASJC) codes
- Materials Science(all)
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Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering. / Ye, Dan; Rongpipi, Sintu; Litofsky, Joshua H.; Lee, Youngmin; Culp, Tyler E.; Yoo, Sang Ha; Jackson, Thomas N.; Wang, Cheng; Gomez, Esther W.; Gomez, Enrique D.
In: MRS Communications, Vol. 9, No. 1, 01.03.2019, p. 224-228.Research output: Contribution to journal › Article
TY - JOUR
T1 - Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering
AU - Ye, Dan
AU - Rongpipi, Sintu
AU - Litofsky, Joshua H.
AU - Lee, Youngmin
AU - Culp, Tyler E.
AU - Yoo, Sang Ha
AU - Jackson, Thomas N.
AU - Wang, Cheng
AU - Gomez, Esther W.
AU - Gomez, Enrique D.
PY - 2019/3/1
Y1 - 2019/3/1
N2 - Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si 3 N 4 and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al 2 O 3 free-standing films for use as RSoXS windows. Al 2 O 3 films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al 2 O 3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si 3 N 4 substrates.
AB - Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si 3 N 4 and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al 2 O 3 free-standing films for use as RSoXS windows. Al 2 O 3 films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al 2 O 3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si 3 N 4 substrates.
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U2 - 10.1557/mrc.2018.195
DO - 10.1557/mrc.2018.195
M3 - Article
AN - SCOPUS:85053689111
VL - 9
SP - 224
EP - 228
JO - MRS Communications
JF - MRS Communications
SN - 2159-6859
IS - 1
ER -