Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering

Dan Ye; Sintu Rongpipi; Joshua H. Litofsky; Youngmin Lee; Tyler E. Culp; Sang Ha Yoo; Thomas N. Jackson; Cheng Wang; Esther W. Gomez; Enrique D. Gomez

doi:10.1557/mrc.2018.195

Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering

Dan Ye, Sintu Rongpipi, Joshua H. Litofsky, Youngmin Lee, Tyler E. Culp, Sang Ha Yoo, Thomas N. Jackson, Cheng Wang, Esther W. Gomez, Enrique D. Gomez

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si ₃ N ₄ and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al ₂ O ₃ free-standing films for use as RSoXS windows. Al ₂ O ₃ films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al ₂ O ₃ windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si ₃ N ₄ substrates.

Original language	English (US)
Pages (from-to)	224-228
Number of pages	5
Journal	MRS Communications
Volume	9
Issue number	1
DOIs	https://doi.org/10.1557/mrc.2018.195
State	Published - Mar 1 2019

All Science Journal Classification (ASJC) codes

Materials Science(all)

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10.1557/mrc.2018.195

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@article{6b94fb2d48a342308c2c4a2517dd0ac3,

title = "Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering",

abstract = " Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si 3 N 4 and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al 2 O 3 free-standing films for use as RSoXS windows. Al 2 O 3 films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al 2 O 3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si 3 N 4 substrates.",

author = "Dan Ye and Sintu Rongpipi and Litofsky, {Joshua H.} and Youngmin Lee and Culp, {Tyler E.} and Yoo, {Sang Ha} and Jackson, {Thomas N.} and Cheng Wang and Gomez, {Esther W.} and Gomez, {Enrique D.}",

note = "Funding Information: Financial support from NSF MRI-1626566 (E.D.G.) and the Grace Woodward Grant for Collaborative Research in Engineering and Medicine (E.W.G.) is acknowledged. D.Y. acknowledges support by an Advanced Light Source Doctoral Fellowship in Residence. The Advanced Light Source is supported by the Director, Office of Science, Office of Basic Energy Sciences, of the US Department of Energy under Contract No. DE-AC02-05CH11231. Publisher Copyright: {\textcopyright} 2018 Materials Research Society.",

year = "2019",

month = mar,

day = "1",

doi = "10.1557/mrc.2018.195",

language = "English (US)",

volume = "9",

pages = "224--228",

journal = "MRS Communications",

issn = "2159-6859",

publisher = "Cambridge University Press",

number = "1",

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T1 - Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering

AU - Ye, Dan

AU - Rongpipi, Sintu

AU - Litofsky, Joshua H.

AU - Lee, Youngmin

AU - Culp, Tyler E.

AU - Yoo, Sang Ha

AU - Jackson, Thomas N.

AU - Wang, Cheng

AU - Gomez, Esther W.

AU - Gomez, Enrique D.

N1 - Funding Information: Financial support from NSF MRI-1626566 (E.D.G.) and the Grace Woodward Grant for Collaborative Research in Engineering and Medicine (E.W.G.) is acknowledged. D.Y. acknowledges support by an Advanced Light Source Doctoral Fellowship in Residence. The Advanced Light Source is supported by the Director, Office of Science, Office of Basic Energy Sciences, of the US Department of Energy under Contract No. DE-AC02-05CH11231. Publisher Copyright: © 2018 Materials Research Society.

PY - 2019/3/1

Y1 - 2019/3/1

N2 - Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si 3 N 4 and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al 2 O 3 free-standing films for use as RSoXS windows. Al 2 O 3 films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al 2 O 3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si 3 N 4 substrates.

AB - Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si 3 N 4 and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al 2 O 3 free-standing films for use as RSoXS windows. Al 2 O 3 films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al 2 O 3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si 3 N 4 substrates.

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Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering

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