Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering

Dan Ye, Sintu Rongpipi, Joshua H. Litofsky, Youngmin Lee, Tyler E. Culp, Sang Ha Yoo, Thomas Nelson Jackson, Cheng Wang, Esther Winter Gomez, Enrique Daniel Gomez

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si 3 N 4 and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al 2 O 3 free-standing films for use as RSoXS windows. Al 2 O 3 films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al 2 O 3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si 3 N 4 substrates.

Original languageEnglish (US)
Pages (from-to)224-228
Number of pages5
JournalMRS Communications
Volume9
Issue number1
DOIs
StatePublished - Mar 1 2019

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Aluminum Oxide
X ray scattering
Nitrogen
Aluminum
X rays
Thin films
Oxides
Fluorescence
Substrates
Block copolymers

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

Cite this

Ye, Dan ; Rongpipi, Sintu ; Litofsky, Joshua H. ; Lee, Youngmin ; Culp, Tyler E. ; Yoo, Sang Ha ; Jackson, Thomas Nelson ; Wang, Cheng ; Gomez, Esther Winter ; Gomez, Enrique Daniel. / Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering. In: MRS Communications. 2019 ; Vol. 9, No. 1. pp. 224-228.
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Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering. / Ye, Dan; Rongpipi, Sintu; Litofsky, Joshua H.; Lee, Youngmin; Culp, Tyler E.; Yoo, Sang Ha; Jackson, Thomas Nelson; Wang, Cheng; Gomez, Esther Winter; Gomez, Enrique Daniel.

In: MRS Communications, Vol. 9, No. 1, 01.03.2019, p. 224-228.

Research output: Contribution to journalArticle

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