An analysis and MIMO extension of a double EWMA run-to-run controller for non-squared systems

Ramkumar Rajagopal, Enrique Del Castillo

Research output: Contribution to journalReview articlepeer-review

27 Scopus citations

Abstract

The double EWMA (exponentially weighted moving average) control method is a popular algorithm for adjusting a process from run to run in semiconductor manufacturing. Until recently, the dEWMA controller had been applied only for the single controllable factor (or input), single quality charcteristic (or output) case. Recently, Del Castillo and Rajagopal4 propose a multivariate double EWMA controller for squared multiple-input, multiple-output (MIMO) processes, where there is an equal number of inputs and outputs. This paper extends the MIMO dEWMA controller for non-squared systems. Two different MIMO dEWMA controllers are presented and their performance studied with application to a Chemical-Mechanical Polishing (CMP) process, a critical semiconductor manufacture processing step that exhibits non-linear dynamics.

Original languageEnglish (US)
Pages (from-to)417-428
Number of pages12
JournalInternational Journal of Reliability, Quality and Safety Engineering
Volume10
Issue number4
DOIs
StatePublished - Dec 2003

All Science Journal Classification (ASJC) codes

  • Computer Science(all)
  • Nuclear Energy and Engineering
  • Safety, Risk, Reliability and Quality
  • Aerospace Engineering
  • Energy Engineering and Power Technology
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'An analysis and MIMO extension of a double EWMA run-to-run controller for non-squared systems'. Together they form a unique fingerprint.

Cite this