An efficient optical propagation technique for optical MEM simulation

Timothy Kurzweg, Steven P. Levitan, Jose A. Martinez, Mark Kahrs, Donald M. Chiarulli

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

As designers become more aggressive in introducing optical components into micro-systems, additional capabilities are required for modeling and simulation tools. Common optical modeling techniques are not applicable for most optical micro-systems, and techniques that are valid are computationally slow. In this paper, we introduce an angular spectrum propagation modeling technique that greatly reduces computation time while maintaining the accuracy of the full scalar formulation. We present simulations of light propagating through optical MEM components and show the advantages of this optical propagation method and the integration of the technique into a system-level multi-domain CAD tool.

Original languageEnglish (US)
Title of host publication2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002
EditorsM. Laudon, B. Romanowicz
Pages352-355
Number of pages4
StatePublished - Dec 1 2002
Event2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002 - San Juan, Puerto Rico
Duration: Apr 21 2002Apr 25 2002

Publication series

Name2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Conference

Conference2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002
CountryPuerto Rico
CitySan Juan
Period4/21/024/25/02

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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