An experimental investigation of the dynamic behavior of an inplane mems shallow arch under electrostatic excitation

Abdallah Ramini, Abdullah Hafiz, Mohammed L.F. Bellaredj, Qais M.Al Hennawi, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present experimental investigation of the nonlinear dynamics of a clamped-clamped in-plane MEMS shallow arch when excited by an electrostatic force. We explore the dynamic behaviors of the in-plane motion of the shallow arches via frequency sweeps in the neighborhood of the first resonance frequency. The shallow arch response is video microscopy recorded and analyzed by means of digital imaging. The experimental data show local softening behavior for small DC and AC loads. For high voltages, the experimental investigation reveals interesting dynamics, where the arch exhibits a dynamic snap-Through behavior. These attractive experimental results verify the previously reported complex behavior of in-plane MEMS arches and show promising results to implement these structures for variety of sensing and actuation applications.

Original languageEnglish (US)
Title of host publication20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791857113
DOIs
Publication statusPublished - Jan 1 2015
EventASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015 - Boston, United States
Duration: Aug 2 2015Aug 5 2015

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Other

OtherASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015
CountryUnited States
CityBoston
Period8/2/158/5/15

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All Science Journal Classification (ASJC) codes

  • Modeling and Simulation
  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

Cite this

Ramini, A., Hafiz, A., Bellaredj, M. L. F., Hennawi, Q. M. A., & Younis, M. I. (2015). An experimental investigation of the dynamic behavior of an inplane mems shallow arch under electrostatic excitation. In 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2015-47070