TY - GEN
T1 - An experimental investigation of the dynamic behavior of an inplane mems shallow arch under electrostatic excitation
AU - Ramini, Abdallah
AU - Hafiz, Abdullah
AU - Bellaredj, Mohammed L.F.
AU - Hennawi, Qais M.Al
AU - Younis, Mohammad I.
N1 - Publisher Copyright:
© Copyright 2015 by ASME.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2015
Y1 - 2015
N2 - We present experimental investigation of the nonlinear dynamics of a clamped-clamped in-plane MEMS shallow arch when excited by an electrostatic force. We explore the dynamic behaviors of the in-plane motion of the shallow arches via frequency sweeps in the neighborhood of the first resonance frequency. The shallow arch response is video microscopy recorded and analyzed by means of digital imaging. The experimental data show local softening behavior for small DC and AC loads. For high voltages, the experimental investigation reveals interesting dynamics, where the arch exhibits a dynamic snap-Through behavior. These attractive experimental results verify the previously reported complex behavior of in-plane MEMS arches and show promising results to implement these structures for variety of sensing and actuation applications.
AB - We present experimental investigation of the nonlinear dynamics of a clamped-clamped in-plane MEMS shallow arch when excited by an electrostatic force. We explore the dynamic behaviors of the in-plane motion of the shallow arches via frequency sweeps in the neighborhood of the first resonance frequency. The shallow arch response is video microscopy recorded and analyzed by means of digital imaging. The experimental data show local softening behavior for small DC and AC loads. For high voltages, the experimental investigation reveals interesting dynamics, where the arch exhibits a dynamic snap-Through behavior. These attractive experimental results verify the previously reported complex behavior of in-plane MEMS arches and show promising results to implement these structures for variety of sensing and actuation applications.
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U2 - 10.1115/DETC2015-47070
DO - 10.1115/DETC2015-47070
M3 - Conference contribution
AN - SCOPUS:84978926998
T3 - Proceedings of the ASME Design Engineering Technical Conference
BT - 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015
Y2 - 2 August 2015 through 5 August 2015
ER -