An iterative method for estimating the pull-in parameters of electrostatic actuators

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Performance of electrostatic actuators used in MEMS devices is severely limited by the stability considerations that are related to the pull-in parameters. The static and dynamic responses of electrostatic actuators driven by single as well as multiple voltage excitations are studied with an aim of estimating these pull-in voltage and distance parameters. A normalized Hamiltonian formulation is adopted and the resulting equations are solved analytically and also numerically using an iterative scheme. Recently a numerical α-line method has been proposed to extract the pull-in parameters. Scanning along the α-lines by voltage and displacement iteration schemes were studied. Estimating the intersection of the α-lines with the pull-in hypersurface indicates maximal voltage variable. We revisit these two iteration schemes and propose few insights to improve the convergence. Convergence of the parameters to the theoretical values is found to be smooth. This approach helps us to generalize the technique for more complicated geometries.

Original languageEnglish (US)
Title of host publicationMicro- and Nanotechnology Sensors, Systems, and Applications
DOIs
StatePublished - Sep 7 2009
EventMicro- and Nanotechnology Sensors, Systems, and Applications - Orlando, FL, United States
Duration: Apr 15 2009Apr 17 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7318
ISSN (Print)0277-786X

Other

OtherMicro- and Nanotechnology Sensors, Systems, and Applications
CountryUnited States
CityOrlando, FL
Period4/15/094/17/09

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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