Analysis and performance of a parallel-axis flatness measuring instrument

Eric Russell Marsh, R. Ryan Vallance

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    This paper describes the design, analysis and performance of a flatness inspection instrument to measure workpieces with up to one millimeter departure from flatness. The instrument uses two air bearing spindles arranged with parallel axes to simultaneously rotate a workpiece and slowly pass a capacitance probe over the spinning surface. Capacitance probes offer user-selectable sensitivity to provide multiple combinations of measurement range and resolution. In tests with a high sensitivity probe, the instrument demonstrated measurement repeatability of 25 nanometers on a Ø75 mm workpiece. This paper presents a complete homogeneous transformation matrix analysis of the propagation of errors into the measurement as well as sample measurements on diamond-turned workpieces.

    Original languageEnglish (US)
    Title of host publicationProceedings of the 21st Annual ASPE Meeting, ASPE 2006
    StatePublished - 2006
    Event21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006 - Monterey, CA, United States
    Duration: Oct 15 2006Oct 20 2006

    Other

    Other21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006
    CountryUnited States
    CityMonterey, CA
    Period10/15/0610/20/06

    All Science Journal Classification (ASJC) codes

    • Mechanical Engineering

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  • Cite this

    Marsh, E. R., & Vallance, R. R. (2006). Analysis and performance of a parallel-axis flatness measuring instrument. In Proceedings of the 21st Annual ASPE Meeting, ASPE 2006