Analysis and performance of a parallel-axis flatness measuring instrument

Eric Russell Marsh, R. Ryan Vallance

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    This paper describes the design, analysis and performance of a flatness inspection instrument to measure workpieces with up to one millimeter departure from flatness. The instrument uses two air bearing spindles arranged with parallel axes to simultaneously rotate a workpiece and slowly pass a capacitance probe over the spinning surface. Capacitance probes offer user-selectable sensitivity to provide multiple combinations of measurement range and resolution. In tests with a high sensitivity probe, the instrument demonstrated measurement repeatability of 25 nanometers on a Ø75 mm workpiece. This paper presents a complete homogeneous transformation matrix analysis of the propagation of errors into the measurement as well as sample measurements on diamond-turned workpieces.

    Original languageEnglish (US)
    Title of host publicationProceedings of the 21st Annual ASPE Meeting, ASPE 2006
    StatePublished - 2006
    Event21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006 - Monterey, CA, United States
    Duration: Oct 15 2006Oct 20 2006

    Other

    Other21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006
    CountryUnited States
    CityMonterey, CA
    Period10/15/0610/20/06

    Fingerprint

    Capacitance
    Bearings (structural)
    Diamonds
    Inspection
    Air

    All Science Journal Classification (ASJC) codes

    • Mechanical Engineering

    Cite this

    Marsh, E. R., & Vallance, R. R. (2006). Analysis and performance of a parallel-axis flatness measuring instrument. In Proceedings of the 21st Annual ASPE Meeting, ASPE 2006
    Marsh, Eric Russell ; Vallance, R. Ryan. / Analysis and performance of a parallel-axis flatness measuring instrument. Proceedings of the 21st Annual ASPE Meeting, ASPE 2006. 2006.
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    abstract = "This paper describes the design, analysis and performance of a flatness inspection instrument to measure workpieces with up to one millimeter departure from flatness. The instrument uses two air bearing spindles arranged with parallel axes to simultaneously rotate a workpiece and slowly pass a capacitance probe over the spinning surface. Capacitance probes offer user-selectable sensitivity to provide multiple combinations of measurement range and resolution. In tests with a high sensitivity probe, the instrument demonstrated measurement repeatability of 25 nanometers on a {\O}75 mm workpiece. This paper presents a complete homogeneous transformation matrix analysis of the propagation of errors into the measurement as well as sample measurements on diamond-turned workpieces.",
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    Marsh, ER & Vallance, RR 2006, Analysis and performance of a parallel-axis flatness measuring instrument. in Proceedings of the 21st Annual ASPE Meeting, ASPE 2006. 21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006, Monterey, CA, United States, 10/15/06.

    Analysis and performance of a parallel-axis flatness measuring instrument. / Marsh, Eric Russell; Vallance, R. Ryan.

    Proceedings of the 21st Annual ASPE Meeting, ASPE 2006. 2006.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

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    Marsh ER, Vallance RR. Analysis and performance of a parallel-axis flatness measuring instrument. In Proceedings of the 21st Annual ASPE Meeting, ASPE 2006. 2006