@inproceedings{0bdd1675a58f400b8408cdb0b5644d27,
title = "Analysis of a parallel-axis flatness measuring instrument",
abstract = "This paper describes the design, analysis and performance of a flatness inspection instrument to measure workpieces with up to one millimeter departure from flatness. The instrument uses two air bearing spindles arranged with parallel axes to simultaneously rotate a workpiece and slowly pass a capacitance probe over the spinning surface. Capacitance probes offer user-selectable sensitivity to provide multiple combinations of measurement range and resolution. In tests with a high sensitivity probe, the instrument demonstrated measurement repeatability of 25 nanometers on a {\O}75 mm workpiece. This paper presents a complete homogeneous transformation matrix analysis of the propagation of errors into the measurement as well as sample measurements on diamond-turned workpieces.",
author = "Marsh, {E. R.} and Blystone, {S. A.} and VanDoren, {M. J.} and Arneson, {D. A.}",
year = "2006",
month = jan,
day = "1",
language = "English (US)",
series = "Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006",
publisher = "euspen",
pages = "317--320",
editor = "H. Zervos",
booktitle = "Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006",
note = "6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006 ; Conference date: 28-05-2006 Through 01-06-2006",
}