Analysis of a parallel-axis flatness measuring instrument

E. R. Marsh, S. A. Blystone, M. J. VanDoren, D. A. Arneson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes the design, analysis and performance of a flatness inspection instrument to measure workpieces with up to one millimeter departure from flatness. The instrument uses two air bearing spindles arranged with parallel axes to simultaneously rotate a workpiece and slowly pass a capacitance probe over the spinning surface. Capacitance probes offer user-selectable sensitivity to provide multiple combinations of measurement range and resolution. In tests with a high sensitivity probe, the instrument demonstrated measurement repeatability of 25 nanometers on a Ø75 mm workpiece. This paper presents a complete homogeneous transformation matrix analysis of the propagation of errors into the measurement as well as sample measurements on diamond-turned workpieces.

Original languageEnglish (US)
Title of host publicationProceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
EditorsH. Zervos
Publishereuspen
Pages317-320
Number of pages4
ISBN (Electronic)0955308208, 9780955308208
StatePublished - Jan 1 2006
Event6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006 - Baden bei Wien, Vienna, Austria
Duration: May 28 2006Jun 1 2006

Publication series

NameProceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
Volume1

Other

Other6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
CountryAustria
CityBaden bei Wien, Vienna
Period5/28/066/1/06

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Materials Science(all)
  • Mechanical Engineering
  • Instrumentation
  • Environmental Engineering

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  • Cite this

    Marsh, E. R., Blystone, S. A., VanDoren, M. J., & Arneson, D. A. (2006). Analysis of a parallel-axis flatness measuring instrument. In H. Zervos (Ed.), Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006 (pp. 317-320). (Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006; Vol. 1). euspen.