The energy and angular distributions of Ni and Al atoms sputtered from Ni3Al(100) by 8 keV Ar+ have been measured using multiphoton resonance ionization detection. The Al atoms, which originate entirely from the top atomic layer of Ni3Al(100), are predominantly sputtered along close packed <110> directions. On the other hand the sputtered Ni flux, which arises from both the first and second layers, has a large component normal to the surface. Molecular dynamics computer simulations agree well with experimental results and suggest that the normal emission of Ni atoms arises primarily from second-layer atoms.
|Original language||English (US)|
|Number of pages||5|
|Journal||Rapid Communications in Mass Spectrometry|
|State||Published - Jan 1 1998|
All Science Journal Classification (ASJC) codes
- Analytical Chemistry
- Organic Chemistry