Anomalous evolution of bubbles in krypton-implanted SiO2

Hannan Assaf, Esidor Ntsoenzok, Marie France Barthe, Elisa Leoni, Marie Odile Ruault, S Ashok

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Thermally grown SiO2 was implanted at room temperature with 220keV Kr in order to generate bubbles/cavities in the sample. The formation and thermal stability of these bubbles/cavities is studied in this work. Transmission Electron Microscopy (TEM), Rutherford Backscattering Spectrometry (RBS) and Positron Annihilation Spectroscopy (PAS) were used to obtain a comprehensive characterization of defects (vacancies, interstitital, bubbles, and other types of defects) created by Kr implantation in SiO2 layer. These measurements suggest that the bubbles observed with TEM are a consequence of the interaction between Kr and vacancies (V), with VnKr m, complexes created in the entire of implanted zone. After annealing, bubbles/cavities disappear from SiO2 due to the strong desorption of Kr and the decrease in vacancy concentration.

Original languageEnglish (US)
Title of host publicationSemiconductor Defect Engineering - Materials, Synthetic Structures and Devices II
PublisherMaterials Research Society
Pages125-130
Number of pages6
ISBN (Print)9781558999541
StatePublished - Jan 1 2007
EventSemiconductor Defect Engineering - Materials, Synthetic Structures and Devices II - San Francisco, CA, United States
Duration: Apr 9 2007Apr 13 2007

Publication series

NameMaterials Research Society Symposium Proceedings
Volume994
ISSN (Print)0272-9172

Other

OtherSemiconductor Defect Engineering - Materials, Synthetic Structures and Devices II
CountryUnited States
CitySan Francisco, CA
Period4/9/074/13/07

Fingerprint

Krypton
krypton
Vacancies
bubbles
Positron annihilation spectroscopy
Transmission electron microscopy
Defects
cavities
Rutherford backscattering spectroscopy
Spectrometry
Desorption
Thermodynamic stability
transmission electron microscopy
Annealing
defects
positron annihilation
spectroscopy
implantation
backscattering
thermal stability

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Assaf, H., Ntsoenzok, E., Barthe, M. F., Leoni, E., Ruault, M. O., & Ashok, S. (2007). Anomalous evolution of bubbles in krypton-implanted SiO2 In Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices II (pp. 125-130). (Materials Research Society Symposium Proceedings; Vol. 994). Materials Research Society.
Assaf, Hannan ; Ntsoenzok, Esidor ; Barthe, Marie France ; Leoni, Elisa ; Ruault, Marie Odile ; Ashok, S. / Anomalous evolution of bubbles in krypton-implanted SiO2 Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices II. Materials Research Society, 2007. pp. 125-130 (Materials Research Society Symposium Proceedings).
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Assaf, H, Ntsoenzok, E, Barthe, MF, Leoni, E, Ruault, MO & Ashok, S 2007, Anomalous evolution of bubbles in krypton-implanted SiO2 in Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices II. Materials Research Society Symposium Proceedings, vol. 994, Materials Research Society, pp. 125-130, Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices II, San Francisco, CA, United States, 4/9/07.

Anomalous evolution of bubbles in krypton-implanted SiO2 . / Assaf, Hannan; Ntsoenzok, Esidor; Barthe, Marie France; Leoni, Elisa; Ruault, Marie Odile; Ashok, S.

Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices II. Materials Research Society, 2007. p. 125-130 (Materials Research Society Symposium Proceedings; Vol. 994).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Assaf H, Ntsoenzok E, Barthe MF, Leoni E, Ruault MO, Ashok S. Anomalous evolution of bubbles in krypton-implanted SiO2 In Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices II. Materials Research Society. 2007. p. 125-130. (Materials Research Society Symposium Proceedings).