Abstract
We have developed a sensitive electron nuclear double resonance spectrometer in which the detection takes place through electrically detected magnetic resonance. We demonstrate that the spectrometer can provide reasonably high signal to noise spectra of 14N interactions with deep level centers in a fully processed bipolar junction transistor at room temperature.
Original language | English (US) |
---|---|
Article number | 123111 |
Journal | Review of Scientific Instruments |
Volume | 90 |
Issue number | 12 |
DOIs | |
State | Published - Dec 1 2019 |
All Science Journal Classification (ASJC) codes
- Instrumentation