Application of MEMS force sensors for in situ mechanical characterization of nano-scale thin films in SEM and TEM

Engineering & Materials Science

• Transmission electron microscopy 89%
• Thin films 82%
• MEMS 80%
• Scanning electron microscopy 68%
• Yield stress 52%
• Aluminum 44%
• Sensors 44%
• Microfabrication 36%
• Tensile testing 33%
• Strain hardening 29%
• Multilayers 28%
• Creep 24%
• Elastic moduli 24%
• Silicon 22%
• Experiments 20%
• Substrates 20%
• Testing 14%

Chemical Compounds

• Yield Point 100%
• Strain Hardening 60%
• Force 58%
• Creep 53%
• Size Effect 49%
• Grain Size 40%
• Multilayer 38%
• Strain 30%
• Application 27%
• Purity 21%
• Time 15%

Physics & Astronomy

• microelectromechanical systems 84%
• scanning electron microscopy 56%
• sensors 53%
• characterization 48%
• thin films 44%
• aluminum 29%
• strain hardening 24%
• yield strength 22%
• modulus of elasticity 17%
• chambers 17%
• alignment 16%
• grain size 16%
• silicon 11%