Are diamonds a MEMS' best friend?

Orlando Auciello, Sergio Pacheco, Anirudha V. Sumant, Chris Gudeman, Suresh Sampath, Arindom Datta, Robert W. Carpick, Vivekananda P. Adiga, Peter Zurcher, Zhenqiang Ma, Hao Chih Yuan, John A. Carlisle, Bernd Kabius, Jon Hiller, Sudarsan Srinivasan

Research output: Contribution to specialist publicationArticle

63 Scopus citations

Abstract

RF microelectromechanical/nanoelectromechanical devices (RF MEMS/NEMS) such as resonators and switches have been proved attractive for the next-generation military and communication systems. Most NEMS/MEMS devices are based on silicon because of the available surface-machining technology adapted from silicon based microelectronics batch fabrication technology. Diamonds provide properties that would potentially enhance the performance of the switches that include tribological and mechanical properties, as well as the low-trap characteristics and capability to tailor the conductivity of diamond films. The fabrication of the diamond-based RF MEMS/NEMS devices require the growth of smooth diamond films with uniform thickness, nanostructure, and properties over large area substrates. Thin-film deposition methods based on microwave plasma enhanced chemical vapor deposition (MPCVD) with hydrogen rich chemistry produce microcrystalline diamond films.

Original languageEnglish (US)
Pages61-75
Number of pages15
Volume8
No6
Specialist publicationIEEE Microwave Magazine
DOIs
StatePublished - Dec 2007

All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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