In order to realize self-powered health monitoring and magnetic field sensors, bottom - up design of nanoscale device was investigated. A MWCNT/SiCN nanotube template was developed that has the potential to act as piezoresistive element. Next, a novel nanotube morphology was synthesized that consists of BaTiO3 (BTO) nanoparticles decorated along the surface of SiCN. Monolayer coating of SiCN on MWCNT serves two purposes: (i) modifies the surface wetting characteristics, and (ii) enhances the piezoresistive effect. Investigation of the mechanisms that provide periodic arrangement of BTO on nanotube surface was conducted using HRTEM and contact angle measurements. X-ray Photoelectron Spectroscopy was performed to confirm perovskite phase of BTO. The SiCN/MWCNT approach was further extended to fabricate magnetoelectric nanowire based sensors designs. In this approach a SiCN-NT template was coated with BTO and CoFe2O4 (CFO) nanoparticles. Microstructural studies indicated the presence of piezoelectric (BTO) as well as magnetic (CFO) material on the nanotube surface. Further, studies are required to overcome the problem of electrical contact on a MEMS chip.