Terahertz time-domain spectroscopy (THz-TDS) is an optical diagnostic used to noninvasively measure plasma electron density and collision frequency. Conventional methods for analyzing THz-TDS plasma diagnostic data often do not account for measurement artifacts and do not quantify parameter uncertainties. We introduce a novel Bayesian framework that overcomes these deficiencies. The framework enables computation of both the density and collision frequency, compensates for artifacts produced by refraction and delay line errors, and quantifies parameter uncertainties caused by noise and imprecise knowledge of unmeasured plasma properties. We demonstrate the framework with sample measurements of a radio frequency inductively-coupled plasma discharge.
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics