A Laser Fired Contact (LFC) is a contact through the dielectric layer between the silicon wafer and backside conductor layer produced by a laser-based technique. This technique holds promise to dramatically reduce the overall manufacturing cost of silicon based solar cells. In an effort to investigate and optimize LFC laser beam delivery, two different beam splitting technologies, diffractive optical element (DOE) and microlens array, are being evaluated and compared. Both types of optics have been used for processing with a Q-switched 532 nm Nd:YAG laser to produce an array of LFCs. The results show both are viable options for producing numerous LFCs simultaneously. However, they each have limitations and advantages over one another.