Beam delivery techniques for laser fired contacts

Zhenyan Hua, Edward William Reutzel, Lian Zou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A Laser Fired Contact (LFC) is a contact through the dielectric layer between the silicon wafer and backside conductor layer produced by a laser-based technique. This technique holds promise to dramatically reduce the overall manufacturing cost of silicon based solar cells. In an effort to investigate and optimize LFC laser beam delivery, two different beam splitting technologies, diffractive optical element (DOE) and microlens array, are being evaluated and compared. Both types of optics have been used for processing with a Q-switched 532 nm Nd:YAG laser to produce an array of LFCs. The results show both are viable options for producing numerous LFCs simultaneously. However, they each have limitations and advantages over one another.

Original languageEnglish (US)
Title of host publication29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Congress Proceedings
Pages1092-1098
Number of pages7
Volume103
StatePublished - 2010
Event29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Anaheim, CA, United States
Duration: Sep 26 2010Sep 30 2010

Other

Other29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010
CountryUnited States
CityAnaheim, CA
Period9/26/109/30/10

Fingerprint

delivery
Lasers
lasers
silicon
Diffractive optical elements
YAG lasers
Silicon
manufacturing
conductors
solar cells
Silicon wafers
wafers
laser beams
optics
Laser beams
costs
Optics
Solar cells
Processing
Costs

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Radiation

Cite this

Hua, Z., Reutzel, E. W., & Zou, L. (2010). Beam delivery techniques for laser fired contacts. In 29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Congress Proceedings (Vol. 103, pp. 1092-1098)
Hua, Zhenyan ; Reutzel, Edward William ; Zou, Lian. / Beam delivery techniques for laser fired contacts. 29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Congress Proceedings. Vol. 103 2010. pp. 1092-1098
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Hua, Z, Reutzel, EW & Zou, L 2010, Beam delivery techniques for laser fired contacts. in 29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Congress Proceedings. vol. 103, pp. 1092-1098, 29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010, Anaheim, CA, United States, 9/26/10.

Beam delivery techniques for laser fired contacts. / Hua, Zhenyan; Reutzel, Edward William; Zou, Lian.

29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Congress Proceedings. Vol. 103 2010. p. 1092-1098.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - A Laser Fired Contact (LFC) is a contact through the dielectric layer between the silicon wafer and backside conductor layer produced by a laser-based technique. This technique holds promise to dramatically reduce the overall manufacturing cost of silicon based solar cells. In an effort to investigate and optimize LFC laser beam delivery, two different beam splitting technologies, diffractive optical element (DOE) and microlens array, are being evaluated and compared. Both types of optics have been used for processing with a Q-switched 532 nm Nd:YAG laser to produce an array of LFCs. The results show both are viable options for producing numerous LFCs simultaneously. However, they each have limitations and advantages over one another.

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Hua Z, Reutzel EW, Zou L. Beam delivery techniques for laser fired contacts. In 29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Congress Proceedings. Vol. 103. 2010. p. 1092-1098