Beam delivery techniques for laser fired contacts

Zhenyan Hua, Edward W. Reutzel, Lian Zou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A Laser Fired Contact (LFC) is a contact through the dielectric layer between the silicon wafer and backside conductor layer produced by a laser-based technique. This technique holds promise to dramatically reduce the overall manufacturing cost of silicon based solar cells. In an effort to investigate and optimize LFC laser beam delivery, two different beam splitting technologies, diffractive optical element (DOE) and microlens array, are being evaluated and compared. Both types of optics have been used for processing with a Q-switched 532 nm Nd:YAG laser to produce an array of LFCs. The results show both are viable options for producing numerous LFCs simultaneously. However, they each have limitations and advantages over one another.

Original languageEnglish (US)
Title of host publication29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Congress Proceedings
PublisherLaser Institute of America
Pages1092-1098
Number of pages7
ISBN (Print)9780912035611
DOIs
StatePublished - 2010

Publication series

Name29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Congress Proceedings
Volume103

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Radiation

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  • Cite this

    Hua, Z., Reutzel, E. W., & Zou, L. (2010). Beam delivery techniques for laser fired contacts. In 29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Congress Proceedings (pp. 1092-1098). (29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Congress Proceedings; Vol. 103). Laser Institute of America. https://doi.org/10.2351/1.5061944