Bending response of a 100nm thick free standing aluminum cantilever beam

M. Taher, A. Saif, Md Amanul Haque

Research output: Contribution to journalArticle

Abstract

A micro instrument is developed to apply force on free standing cantilever samples with subμm thickness. The objective is to study the effect of small thickness on the strength of materials when subjected to bending. The instrument consists of a MEMS actuator, 2mm × 3mm in size, and 20μm deep. It is employed to study an annealed Al cantilever sample, 110nm thick, 2μm wide and 15μm long, fabricated by evaporation. The sample yields at 841M Pa during the first cycle of loading. It is then unloaded and reloaded, when yielding occurs at 1200M Pa. To the best of our knowledge, this is the first reported experiment on free standing submicron metal film subjected to bending.

Original languageEnglish (US)
Pages (from-to)207-211
Number of pages5
JournalMaterials Research Society Symposium - Proceedings
Volume594
StatePublished - Dec 1 2000

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cantilever beams
Cantilever beams
Aluminum
aluminum
MEMS
Strength of materials
Evaporation
Actuators
Metals
metal films
microelectromechanical systems
actuators
evaporation
mechanical properties
cycles
Experiments

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

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Bending response of a 100nm thick free standing aluminum cantilever beam. / Taher, M.; Saif, A.; Haque, Md Amanul.

In: Materials Research Society Symposium - Proceedings, Vol. 594, 01.12.2000, p. 207-211.

Research output: Contribution to journalArticle

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