TY - JOUR
T1 - Bioinspired, multifunctional dual-mode pressure sensors as electronic skin for decoding complex loading processes and human motions
AU - Qiu, Ye
AU - Tian, Ye
AU - Sun, Shenshen
AU - Hu, Jiahui
AU - Wang, Youyan
AU - Zhang, Zheng
AU - Liu, Aiping
AU - Cheng, Huanyu
AU - Gao, Weizhan
AU - Zhang, Wenan
AU - Chai, Hao
AU - Wu, Huaping
N1 - Funding Information:
This work was supported by the National Science Foundation of China (Grant no. 11672269 , 11972323 , 51572242 and 51675485 ), the Zhejiang Provincial Natural Science Foundation of China (Grant no. LR20A020002 , LR19E020004 , and LR18E050002), the Fundamental Research Funds for the Provincial Universities of Zhejiang ( RF-B2019004 ), the 111 Project (no. D16004), and the Zhejiang Lab's International Talent Fund for Young Professionals .
Funding Information:
According to the SEM image of the surface morphology of the prepared pyramidal microstructures (inset of Fig. S1c, Supporting Information), the m value in the pyramidal microstructures is 10. The hemispherical microstructures prepared by following the method in the previous literature report [50] leads to a choice of 5 for the m value. The theoretical calculation results show that the thin film with a pyramid-shaped structure has a large voltage output compared to the cylinder- and hemisphere-shaped micropatterned thin films under the same pressure, which is further confirmed by the ABAQUS simulation (Fig. 2a). Compared to the cylinder- and hemisphere-shaped microstructures, the film with a pyramid-shaped structure has a larger stress/strain variation along the thickness direction and therefore gives higher piezoelectric output, which is consistent with the previously reported results on pressure sensors with different microstructures (e.g., cylindrical, hemispherical, pyramidal microstructures) [51].Precisely capturing the real-time dynamically changing stimuli creates application opportunities for the dual-mode sensor in intelligent robots [72] and future human-machine interfaces. The dual-mode sensor is first demonstrated as a smart manipulator in intelligent factories to grab and transport delicate objects on the assembly line toward the former application (Fig. 5a). Simply attaching the dual-mode sensor on the joint of the manipulator allows it to self-monitor its operation stage (Fig. 5b). The bending direction, rate, and angle of the manipulator can be decoded from the comprehensive analysis of the measured piezoelectric and piezoresistive signals. Realizing the full potential of future human-machine interfaces also hinges on the real-time monitoring of both the speed and gesture, because the range of motion controls is significantly limited by the simple gesture/motion detection. Applying the dual-mode sensor on the human wrist easily expands the previous motion detection into various aspects of motions, including motion direction, range, and speed (Fig. 5c). Furthermore, the application of the flexible dual-mode sensor for an interactive human-machine interface demonstrates its capability to control the manipulator for specific gestures (Fig. 5c) as instructed by the human wrist in real-time (Fig. 5d). In brief, the acquired sensing signals from the wrist motions are processed by an analog-to-digital converter (ADC) after amplification and filtering. Next, the digital signals from the ADC module are further received and processed by the micro-controller, which are then sent to a workstation PC via a serial port. The classified control commands from the workstation PC are sent to the Franka Control Interface to control the Franka manipulator as instructed by the human wrist through the changes in bending direction, angle, and rate (Movie S1, Supporting Information).The piezoresistive and piezoelectric signals of the sensors induced by pressure were measured by using a semiconductor parameter analyzer (4200-SCS, Keithley) and piezoelectric data acquisition system (KSI), respectively (Fig. S14, Supporting Information). The low-frequency compression and bending tests were carried out using a mechanical testing system (INSTRON LEGEND2345). The high-frequency loading was applied by driving an exciter (KSI-758MS20) on the sensor that was positioned under a cylindrical probe (KSI-758STNG3.25). The excitation signal was amplified by a power amplifier (KSI-758PA100) to drive the exciter. The magnitude of the force input to the sensor was measured by a calibrated piezoelectric force transducer (KSI-208) with a sensitivity of 4 pC/N. The output from the force transducer was passed through a charge amplifier (KSI-608A100) before being recorded by a high-precision network data analyzer (KSI?8904 N).This work was supported by the National Science Foundation of China (Grant no. 11672269, 11972323, 51572242 and 51675485), the Zhejiang Provincial Natural Science Foundation of China (Grant no. LR20A020002, LR19E020004, and LR18E050002), the Fundamental Research Funds for the Provincial Universities of Zhejiang (RF-B2019004), the 111 Project (no. D16004), and the Zhejiang Lab's International Talent Fund for Young Professionals.
Publisher Copyright:
© 2020 Elsevier Ltd
PY - 2020/12
Y1 - 2020/12
N2 - Mimicry of the somatosensory system in the human skin via electronic devices exhibits broad applications in intelligent robotics and wearable electronics. Here, we report a novel biomimetic flexible dual-mode pressure sensor that is based on the interlocked piezoelectric and piezoresistive films with pyramid microstructures. The sensitivity of the sensor is significantly enhanced because of the induced larger stain variation along the thickness direction of the former piezoelectric film and increased contact area in the latter piezoresistive film. The synergistic effect of the piezoelectric and piezoresistive responses to stimuli also allows the dual-mode sensor to detect over broad pressure and frequency ranges. The analysis of these signals can deconvolute multiple aspects of the complex stimuli loading processes, including their loading direction, rate, magnitude, and duration. As a proof-of-concept demonstration, the dual-mode pressure sensor is successfully integrated with manipulators and human bodies to decode the complex and delicate picking processes and human motions, respectively. When combined with the other sensing modalities, the multifunctional dual-mode pressure sensor delivers new application opportunities in intelligent soft robotics and human-machine interfaces.
AB - Mimicry of the somatosensory system in the human skin via electronic devices exhibits broad applications in intelligent robotics and wearable electronics. Here, we report a novel biomimetic flexible dual-mode pressure sensor that is based on the interlocked piezoelectric and piezoresistive films with pyramid microstructures. The sensitivity of the sensor is significantly enhanced because of the induced larger stain variation along the thickness direction of the former piezoelectric film and increased contact area in the latter piezoresistive film. The synergistic effect of the piezoelectric and piezoresistive responses to stimuli also allows the dual-mode sensor to detect over broad pressure and frequency ranges. The analysis of these signals can deconvolute multiple aspects of the complex stimuli loading processes, including their loading direction, rate, magnitude, and duration. As a proof-of-concept demonstration, the dual-mode pressure sensor is successfully integrated with manipulators and human bodies to decode the complex and delicate picking processes and human motions, respectively. When combined with the other sensing modalities, the multifunctional dual-mode pressure sensor delivers new application opportunities in intelligent soft robotics and human-machine interfaces.
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U2 - 10.1016/j.nanoen.2020.105337
DO - 10.1016/j.nanoen.2020.105337
M3 - Article
AN - SCOPUS:85090915596
VL - 78
JO - Nano Energy
JF - Nano Energy
SN - 2211-2855
M1 - 105337
ER -