Black silicon created by interfered femtosecond laser illumination

Chao Wang, Chih Min Lin, Shizhuo Yin, Paul Ruffin, Christina Brantley, Eugene Edwards

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    3 Scopus citations

    Abstract

    A periodic parallel microgrooves on the silicon substrate with 2.5 um spacing covered by various nanostructures can be fabricated by using the interfered femtosecond laser illumination. The morphology created by this approach is apparently different from the common method using the femtosecond laser and sulfur hexafluoride (SF6). However, the treated silicon area could tremendously reduce the reflection from the surface. The reflectance of the structured surface is around 5% throughout the visible to near IR (1.1 um) despite of the viewing angle, which is comparative. Furthermore, the effect of the reflectance reduction is weaker but still obvious when wavelength is beyond 1.1 um, which is believed to be able to extend to the mid IR range.

    Original languageEnglish (US)
    Title of host publicationPhotonic Fiber and Crystal Devices
    Subtitle of host publicationAdvances in Materials and Innovations in Device Applications VI
    DOIs
    StatePublished - Dec 1 2012
    EventPhotonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VI - San Diego, CA, United States
    Duration: Aug 12 2012Aug 13 2012

    Publication series

    NameProceedings of SPIE - The International Society for Optical Engineering
    Volume8497
    ISSN (Print)0277-786X

    Other

    OtherPhotonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VI
    CountryUnited States
    CitySan Diego, CA
    Period8/12/128/13/12

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Computer Science Applications
    • Applied Mathematics
    • Electrical and Electronic Engineering

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  • Cite this

    Wang, C., Lin, C. M., Yin, S., Ruffin, P., Brantley, C., & Edwards, E. (2012). Black silicon created by interfered femtosecond laser illumination. In Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VI [84970W] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8497). https://doi.org/10.1117/12.932230