Bulk acoustic wave resonators for infrared detection applications

Marcelo B. Pisani, P. Kao, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports on the fabrication and application of Y-cut temperature-sensitive quartz resonators for infrared detection applications. The high thermal sensitivity of the Y-cut quartz crystal (90 ppm/K) and the high quality factor (>10,000) of the piezoelectric bulk acoustic wave resonators fabricated from such crystals enable the application of these devices as extremely sensitive uncooled thermal infrared (IR) detectors. We report the fabrication and performance of inverted mesa devices with 1 mm diameter and 18 μm thickness with 6.8 kHz/K of temperature sensitivity at 90 MHz.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1959-1962
Number of pages4
DOIs
StatePublished - Dec 11 2009
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: Jun 21 2009Jun 25 2009

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period6/21/096/25/09

Fingerprint

Resonators
Acoustic waves
Infrared radiation
Quartz
Fabrication
Crystals
Infrared detectors
Temperature
Hot Temperature

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Pisani, M. B., Kao, P., & Tadigadapa, S. A. (2009). Bulk acoustic wave resonators for infrared detection applications. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1959-1962). [5285674] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285674
Pisani, Marcelo B. ; Kao, P. ; Tadigadapa, Srinivas A. / Bulk acoustic wave resonators for infrared detection applications. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. pp. 1959-1962 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).
@inproceedings{729f4e73cdc645ff8b832b5494b15301,
title = "Bulk acoustic wave resonators for infrared detection applications",
abstract = "This paper reports on the fabrication and application of Y-cut temperature-sensitive quartz resonators for infrared detection applications. The high thermal sensitivity of the Y-cut quartz crystal (90 ppm/K) and the high quality factor (>10,000) of the piezoelectric bulk acoustic wave resonators fabricated from such crystals enable the application of these devices as extremely sensitive uncooled thermal infrared (IR) detectors. We report the fabrication and performance of inverted mesa devices with 1 mm diameter and 18 μm thickness with 6.8 kHz/K of temperature sensitivity at 90 MHz.",
author = "Pisani, {Marcelo B.} and P. Kao and Tadigadapa, {Srinivas A.}",
year = "2009",
month = "12",
day = "11",
doi = "10.1109/SENSOR.2009.5285674",
language = "English (US)",
isbn = "9781424441938",
series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "1959--1962",
booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

}

Pisani, MB, Kao, P & Tadigadapa, SA 2009, Bulk acoustic wave resonators for infrared detection applications. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285674, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1959-1962, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 6/21/09. https://doi.org/10.1109/SENSOR.2009.5285674

Bulk acoustic wave resonators for infrared detection applications. / Pisani, Marcelo B.; Kao, P.; Tadigadapa, Srinivas A.

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1959-1962 5285674 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Bulk acoustic wave resonators for infrared detection applications

AU - Pisani, Marcelo B.

AU - Kao, P.

AU - Tadigadapa, Srinivas A.

PY - 2009/12/11

Y1 - 2009/12/11

N2 - This paper reports on the fabrication and application of Y-cut temperature-sensitive quartz resonators for infrared detection applications. The high thermal sensitivity of the Y-cut quartz crystal (90 ppm/K) and the high quality factor (>10,000) of the piezoelectric bulk acoustic wave resonators fabricated from such crystals enable the application of these devices as extremely sensitive uncooled thermal infrared (IR) detectors. We report the fabrication and performance of inverted mesa devices with 1 mm diameter and 18 μm thickness with 6.8 kHz/K of temperature sensitivity at 90 MHz.

AB - This paper reports on the fabrication and application of Y-cut temperature-sensitive quartz resonators for infrared detection applications. The high thermal sensitivity of the Y-cut quartz crystal (90 ppm/K) and the high quality factor (>10,000) of the piezoelectric bulk acoustic wave resonators fabricated from such crystals enable the application of these devices as extremely sensitive uncooled thermal infrared (IR) detectors. We report the fabrication and performance of inverted mesa devices with 1 mm diameter and 18 μm thickness with 6.8 kHz/K of temperature sensitivity at 90 MHz.

UR - http://www.scopus.com/inward/record.url?scp=71449124080&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=71449124080&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2009.5285674

DO - 10.1109/SENSOR.2009.5285674

M3 - Conference contribution

AN - SCOPUS:71449124080

SN - 9781424441938

T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

SP - 1959

EP - 1962

BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

ER -

Pisani MB, Kao P, Tadigadapa SA. Bulk acoustic wave resonators for infrared detection applications. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1959-1962. 5285674. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285674