CAD tool for optical MEMS

Timothy Kurzweg, Steven P. Levitan, Philippe J. Marchand, Jose A. Martinez, Kurt R. Prough, Donald M. Chiarulli

Research output: Contribution to journalConference article

10 Scopus citations

Abstract

Chatoyant models free-space opto-electronic components and systems and performs simulations and analyses that allow designers to make informed system level trade-offs. Recently, the use of MEM bulk and surface micro-machining technology has enabled the fabrication of micro-optical-mechanical systems. This paper presents our models for diffractive optics and new analysis techniques which extend Chatoyant to support optical MEMS design. We show these features in the simulation of two optical MEM systems.

Original languageEnglish (US)
Pages (from-to)879-884
Number of pages6
JournalProceedings - Design Automation Conference
Publication statusPublished - Jan 1 1999
EventProceedings of the 1999 36th Annual Design Automation Conference (DAC) - New Orleans, LA, USA
Duration: Jun 21 1999Jun 25 1999

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All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Control and Systems Engineering

Cite this

Kurzweg, T., Levitan, S. P., Marchand, P. J., Martinez, J. A., Prough, K. R., & Chiarulli, D. M. (1999). CAD tool for optical MEMS. Proceedings - Design Automation Conference, 879-884.