Thin films of YBa2Cu3O7 were deposited on (100) and (110) SrTiO3 substrates by magnetron sputtering. Films were produced with c axis, a axis, (110) and mixed (110)/(013) orientations depending on substrate orientation and on substrate temperatures, as determined by X-ray diffraction. Helium ion channelling was applied to analyse the films. In all cases single crystalline growth was detected. The best minimum yield values Xmin of c axis and a axis oriented films on (100) SrTiO3 were 15% and 25% respectively, whereas those of (110) and (110)/(013) oriented films on (110) SrTiO3 were about 50% for 2 MeV helium ions. The Xmin values of the films were found to depend strongly on the substrate quality whereas only a weak dependence of Xmin on the film thickness between 130 and 3000 Å was observed.
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