Channelling behaviour of expitaxial YBa2Cu3O7 films with various orientations

Q. Li, F. Weschenfelder, O. Meyer, X. X. Xi, G. Linker, J. Geerk

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Thin films of YBa2Cu3O7 were deposited on (100) and (110) SrTiO3 substrates by magnetron sputtering. Films were produced with c axis, a axis, (110) and mixed (110)/(013) orientations depending on substrate orientation and on substrate temperatures, as determined by X-ray diffraction. Helium ion channelling was applied to analyse the films. In all cases single crystalline growth was detected. The best minimum yield values Xmin of c axis and a axis oriented films on (100) SrTiO3 were 15% and 25% respectively, whereas those of (110) and (110)/(013) oriented films on (110) SrTiO3 were about 50% for 2 MeV helium ions. The Xmin values of the films were found to depend strongly on the substrate quality whereas only a weak dependence of Xmin on the film thickness between 130 and 3000 Å was observed.

Original languageEnglish (US)
Pages (from-to)295-301
Number of pages7
JournalJournal of The Less-Common Metals
Volume151
Issue numberC
DOIs
StatePublished - May 15 1989

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Helium
Substrates
Ions
Magnetron sputtering
Film thickness
barium copper yttrium oxide
Crystalline materials
X ray diffraction
Thin films
strontium titanium oxide
Temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Li, Q. ; Weschenfelder, F. ; Meyer, O. ; Xi, X. X. ; Linker, G. ; Geerk, J. / Channelling behaviour of expitaxial YBa2Cu3O7 films with various orientations. In: Journal of The Less-Common Metals. 1989 ; Vol. 151, No. C. pp. 295-301.
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abstract = "Thin films of YBa2Cu3O7 were deposited on (100) and (110) SrTiO3 substrates by magnetron sputtering. Films were produced with c axis, a axis, (110) and mixed (110)/(013) orientations depending on substrate orientation and on substrate temperatures, as determined by X-ray diffraction. Helium ion channelling was applied to analyse the films. In all cases single crystalline growth was detected. The best minimum yield values Xmin of c axis and a axis oriented films on (100) SrTiO3 were 15{\%} and 25{\%} respectively, whereas those of (110) and (110)/(013) oriented films on (110) SrTiO3 were about 50{\%} for 2 MeV helium ions. The Xmin values of the films were found to depend strongly on the substrate quality whereas only a weak dependence of Xmin on the film thickness between 130 and 3000 {\AA} was observed.",
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Channelling behaviour of expitaxial YBa2Cu3O7 films with various orientations. / Li, Q.; Weschenfelder, F.; Meyer, O.; Xi, X. X.; Linker, G.; Geerk, J.

In: Journal of The Less-Common Metals, Vol. 151, No. C, 15.05.1989, p. 295-301.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Channelling behaviour of expitaxial YBa2Cu3O7 films with various orientations

AU - Li, Q.

AU - Weschenfelder, F.

AU - Meyer, O.

AU - Xi, X. X.

AU - Linker, G.

AU - Geerk, J.

PY - 1989/5/15

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N2 - Thin films of YBa2Cu3O7 were deposited on (100) and (110) SrTiO3 substrates by magnetron sputtering. Films were produced with c axis, a axis, (110) and mixed (110)/(013) orientations depending on substrate orientation and on substrate temperatures, as determined by X-ray diffraction. Helium ion channelling was applied to analyse the films. In all cases single crystalline growth was detected. The best minimum yield values Xmin of c axis and a axis oriented films on (100) SrTiO3 were 15% and 25% respectively, whereas those of (110) and (110)/(013) oriented films on (110) SrTiO3 were about 50% for 2 MeV helium ions. The Xmin values of the films were found to depend strongly on the substrate quality whereas only a weak dependence of Xmin on the film thickness between 130 and 3000 Å was observed.

AB - Thin films of YBa2Cu3O7 were deposited on (100) and (110) SrTiO3 substrates by magnetron sputtering. Films were produced with c axis, a axis, (110) and mixed (110)/(013) orientations depending on substrate orientation and on substrate temperatures, as determined by X-ray diffraction. Helium ion channelling was applied to analyse the films. In all cases single crystalline growth was detected. The best minimum yield values Xmin of c axis and a axis oriented films on (100) SrTiO3 were 15% and 25% respectively, whereas those of (110) and (110)/(013) oriented films on (110) SrTiO3 were about 50% for 2 MeV helium ions. The Xmin values of the films were found to depend strongly on the substrate quality whereas only a weak dependence of Xmin on the film thickness between 130 and 3000 Å was observed.

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